Real-time optical monitoring of ammonia flow and decomposition kinetics under high-pressure chemical vapor deposition conditions
2005 ◽
Vol 23
(4)
◽
pp. 1221-1227
◽
2005 ◽
Vol 23
(4)
◽
pp. 1790
◽
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Keyword(s):
Keyword(s):
Keyword(s):
2007 ◽
Vol 25
(4)
◽
pp. 967-970
◽
Keyword(s):