Quantitative analysis of CN∕TiCN∕TiN multilayers and their thermal stability by Auger electron spectroscopy and Rutherford backscattering spectrometry depth profiles
2006 ◽
Vol 24
(2)
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pp. 250-260
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1986 ◽
Vol 4
(6)
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pp. 2463-2469
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1989 ◽
Vol 7
(3)
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pp. 1601-1607
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1994 ◽
Vol 22
(1-12)
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pp. 175-180
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1987 ◽
Vol 153
(1-3)
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pp. 149-157
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1998 ◽
Vol 16
(3)
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pp. 1103-1105
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1991 ◽
Vol 341
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pp. 70-73
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