Effect of negative bias voltage on CrN films deposited by arc ion plating. II. Film composition, structure, and properties

2008 ◽  
Vol 26 (5) ◽  
pp. 1267-1276 ◽  
Author(s):  
Qi Min Wang ◽  
Kwang Ho Kim
Keyword(s):  
Bias Voltage ◽  
Negative Bias ◽  
Structure And Properties ◽  
Negative Bias Voltage ◽  
Film Composition ◽  
Arc Ion Plating ◽  
Ion Plating ◽  
Composition Structure

The effect of applied substrate negative bias voltage on the structure and properties of Al-containing a-C:H thin films

2008 ◽  
Vol 202 (12) ◽  
pp. 2684-2689 ◽  
Author(s):  
Guangan Zhang ◽  
Pengxun Yan ◽  
Peng Wang ◽  
Youming Chen ◽  
Junying Zhang ◽  
...  
Keyword(s):  
Thin Films ◽  
Bias Voltage ◽  
Negative Bias ◽  
Structure And Properties ◽  
Negative Bias Voltage

The Effects of Substrate Negative Bias Voltage on Morphology and Properties Base on Multi-Arc Ion Plating

2012 ◽  
Vol 217-219 ◽  
pp. 1235-1238
Author(s):  
Long Lu ◽  
Guang Guang Feng
Keyword(s):  
Bias Voltage ◽  
Bonding Strength ◽  
Steel Substrate ◽  
Negative Bias ◽  
Bias Parameter ◽  
Micro Hardness ◽  
Negative Bias Voltage ◽  
Ion Plating ◽  
Optimal Value ◽  
40Cr Steel

40Cr steel substrate was coated with Ti0.33Al0.67N films by Multi-arc ion technology. Analyses of substrate negative bias voltage on morphology thickness of the film, bonding strength and micro hardness and other properties. The substrate negative bias parameter designs within the scope of the existence of an optimal value, in order to get the optimal performance of the film.

scholarly journals Effects of Negative Bias Voltage and Ratio of Nitrogen and Argon on the Structure and Properties of NbN Coatings Deposited by HiPIMS Deposition System

Coatings ◽  
2017 ◽  
Vol 8 (1) ◽  
pp. 10 ◽  
Author(s):  
Jicheng Ding ◽  
Tengfei Zhang ◽  
Haijuan Mei ◽  
Je Yun ◽  
Seong Jeong ◽  
...  
Keyword(s):  
Bias Voltage ◽  
Negative Bias ◽  
Structure And Properties ◽  
Negative Bias Voltage

scholarly journals Influence of Applied Bias Voltage on the Composition, Structure, and Properties of Ti:Si-Codoped a-C:H Films Prepared by Magnetron Sputtering

2014 ◽  
Vol 2014 ◽  
pp. 1-7 ◽  
Author(s):  
Jinlong Jiang ◽  
Qiong Wang ◽  
Yubao Wang ◽  
Zhang Xia ◽  
Hua Yang ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Surface Roughness ◽  
Magnetron Sputtering ◽  
Bias Voltage ◽  
Tribological Properties ◽  
Structure And Properties ◽  
Applied Bias ◽  
Applied Bias Voltage ◽  
Methane Mixture ◽  
Composition Structure

The titanium- and silicon-codoped a-C:H films were prepared at different applied bias voltage by magnetron sputtering TiSi target in argon and methane mixture atmosphere. The influence of the applied bias voltage on the composition, surface morphology, structure, and mechanical properties of the films was investigated by XPS, AFM, Raman, FTIR spectroscopy, and nanoindenter. The tribological properties of the films were characterized on an UMT-2MT tribometer. The results demonstrated that the film became smoother and denser with increasing the applied bias voltage up to −200 V, whereas surface roughness increased due to the enhancement of ion bombardment as the applied bias voltage further increased. The sp3carbon fraction in the films monotonously decreased with increasing the applied bias voltage. The film exhibited moderate hardness and the superior tribological properties at the applied bias voltage of −100 V. The tribological behaviors are correlated to the H/E or H3/E2ratio of the films.

Effect of bias voltage on the oxidation resistance of NiCoCrAlYTa coatings prepared by arc ion plating

2019 ◽  
Vol 147 ◽  
pp. 330-341 ◽  
Author(s):  
Shiming Xie ◽  
Mingjiang Dai ◽  
Songsheng Lin ◽  
Qian Shi ◽  
Chen Song ◽  
...  
Keyword(s):  
Oxidation Resistance ◽  
Bias Voltage ◽  
Arc Ion Plating ◽  
Ion Plating
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