scholarly journals Influence of Applied Bias Voltage on the Composition, Structure, and Properties of Ti:Si-Codoped a-C:H Films Prepared by Magnetron Sputtering

2014 ◽  
Vol 2014 ◽  
pp. 1-7 ◽  
Author(s):  
Jinlong Jiang ◽  
Qiong Wang ◽  
Yubao Wang ◽  
Zhang Xia ◽  
Hua Yang ◽  
...  

The titanium- and silicon-codoped a-C:H films were prepared at different applied bias voltage by magnetron sputtering TiSi target in argon and methane mixture atmosphere. The influence of the applied bias voltage on the composition, surface morphology, structure, and mechanical properties of the films was investigated by XPS, AFM, Raman, FTIR spectroscopy, and nanoindenter. The tribological properties of the films were characterized on an UMT-2MT tribometer. The results demonstrated that the film became smoother and denser with increasing the applied bias voltage up to −200 V, whereas surface roughness increased due to the enhancement of ion bombardment as the applied bias voltage further increased. The sp3carbon fraction in the films monotonously decreased with increasing the applied bias voltage. The film exhibited moderate hardness and the superior tribological properties at the applied bias voltage of −100 V. The tribological behaviors are correlated to the H/E or H3/E2ratio of the films.

2016 ◽  
Vol 38 (5) ◽  
pp. 337-350 ◽  
Author(s):  
J. C. Caicedo ◽  
R. Gonzalez ◽  
H. H. Caicedo ◽  
M. Gholipourmalekabadi ◽  
C. Amaya

2014 ◽  
Vol 996 ◽  
pp. 14-21 ◽  
Author(s):  
Christoph Schmid ◽  
Harald Hetzner ◽  
Stephan Tremmel ◽  
Felix Hilpert ◽  
Karsten Durst

In this study, three different a-C:H:W coatings with predefined hardness values, ranging from 10 up to 16 GPa, were deposited by adjusting bias voltage according to a previously created regression model. For this purpose, the influence of the main process parameters of the used reactive unbalanced magnetron sputtering process on the mechanical properties of the a-C:H:W coating was investigated previously by nanoindentation. For a systematical evaluation of the single effects, parameters were varied according to a central composite design. The three coating variants of this study were investigated in terms of microstructure, mechanical properties and residual stresses. It turned out, that by the use of the regression model, a-C:H:W coatings with tailored mechanical properties can be deposited. Residual stresses were measured by means of focused ion beam milling of a double-slit geometry, which causes the internal stresses to relax, and mapping of the resultant relief strain by digital image correlation. A linear relation between the applied bias voltage and the hardness, the modulus of the coating as well as the determined relief strain was observed. Thus, residual stresses of the coatings increase disproportionately with applied bias voltage. The obtained results can be helpful for tailored coating design and further optimization of a-C:H:W coatings.


2005 ◽  
Vol 20 (1) ◽  
pp. 62-67 ◽  
Author(s):  
E. György ◽  
A. Pérez del Pino ◽  
P. Serra ◽  
J.L. Morenza

Titanium targets with a bias voltage ranging from −500 to +500 V were submitted to multipulse high repetition rate Nd:yttrium aluminum garnet (YAG; λ = 1.064 μm, τ ∼ 300 ns, ν = 30 kHz) laser irradiations in nitrogen at intensity values below the single-pulse melting threshold. The morphology of the TiN structures formed under the cumulative action of the laser pulses on the surface of the unbiased and biased targets was investigated by profilometry and scanning electron microscopy. Under these irradiation conditions, a specific columnar surface microrelief developed. The height of the microcolumns reached about 10–15 μm, and their diameter about 1–2 μm. The development of TiN microcolumns was enhanced by the applied bias voltage. The enhancement in the negative biased samples was stronger than that in the positive biased ones.


2021 ◽  
pp. 71-75
Author(s):  

The influence of thermal and aerothermoacoustic treatments on the structure and mechanical properties of БрНХК bronze is considered. An increase in the strength and elasticity of the alloy is established by optimizing the thermal and aerothermoacoustic modes. The influence of the pre-aging treatment, the aging and aerothermoacoustic modes on the structure, the possibility of an additional increase in the mechanical properties of wire from БрНХК after aerothermoacoustic treatment are shown. Keywords: bronze, heat treatment, aerothermoacoustic treatment, microstructure, mechanical properties. [email protected]


VLSI Design ◽  
2001 ◽  
Vol 13 (1-4) ◽  
pp. 149-153
Author(s):  
M. Girlanda ◽  
M. Macucci

We present a numerical simulation of the operation of a chain of 3 Quantum Cellular Automanton (QCA) cells, with the inclusion of a realistic procedure to enforce, with an externally applied bias voltage unbalance, the polarization of the first cell. The polarization state is shown to propagate correctly, as long as the bias unbalance applied to the electrodes of the first cell is not so large as to directly perturb nearby cells. The addition of dummy cells is needed to balance the asymmetries existing at the ends of a chain: this is an indication of further difficulties, that may become relevant if fabrication of more complex arrays is attempted.


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