Comparison of ZnO nanostructures grown using pulsed laser deposition, metal organic chemical vapor deposition, and physical vapor transport

Author(s):  
V. E. Sandana ◽  
D. J. Rogers ◽  
F. Hosseini Teherani ◽  
R. McClintock ◽  
C. Bayram ◽  
...  
2014 ◽  
Vol 492 ◽  
pp. 311-315
Author(s):  
Bashir Ahmmad ◽  
Kensaku Kanomata ◽  
Fumihiko Hirose

Metal-organic chemical vapor deposition (MOCVD) method has been applied to grow nanostructured ZnO films on Si (100) substrate at temperatures ranging from 200 to 550 °C. The as-prepared films were characterized by XRD, SEM, XPS analysis. The growth rate of ZnO films increases with increasing the deposition temperatures. The deposition temperatures have a drastic effect on the crystallinity and morphology of the nanostructured ZnO. Whisker shaped ZnO is formed at a temperature of 350 °C. The deposition time also affects the morphology of the particles. At 400 °C, sample with one hour deposition forms whisker shaped ZnO nanostructures whereas that of with two hours deposition forms flower-like nanostructures.


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