Controlled Morphologies of Nanostructured ZnO Films by MOCVD Method

Metal-organic chemical vapor deposition (MOCVD) method has been applied to grow nanostructured ZnO films on Si (100) substrate at temperatures ranging from 200 to 550 °C. The as-prepared films were characterized by XRD, SEM, XPS analysis. The growth rate of ZnO films increases with increasing the deposition temperatures. The deposition temperatures have a drastic effect on the crystallinity and morphology of the nanostructured ZnO. Whisker shaped ZnO is formed at a temperature of 350 °C. The deposition time also affects the morphology of the particles. At 400 °C, sample with one hour deposition forms whisker shaped ZnO nanostructures whereas that of with two hours deposition forms flower-like nanostructures.