Detailed simulation study of embedded SiGe and Si:C source/drain stressors in nanoscaled silicon on insulator metal oxide semiconductor field effect transistors

Author(s):  
Stefan Flachowsky ◽  
Ralf Illgen ◽  
Tom Herrmann ◽  
Wilfried Klix ◽  
Roland Stenzel ◽  
...  
2009 ◽  
Vol 48 (9) ◽  
pp. 091201
Author(s):  
Jong Pil Kim ◽  
Jae Young Song ◽  
Sang Wan Kim ◽  
Jae Hyun Park ◽  
Woo Young Choi ◽  
...  

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