Effects of segregation strength and an external field on the thermal line edge and line width roughness spectra of a diblock copolymer resist
2011 ◽
Vol 29
(3)
◽
pp. 031803
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2015 ◽
Vol 158
◽
pp. 265-267
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Keyword(s):
2014 ◽
Vol 215
◽
pp. 233-236
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2008 ◽
Vol 112
(50)
◽
pp. 16170-16181
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Modeling the power spectrum of thermal line edge roughness in a lamellar diblock copolymer mesophase
2011 ◽
Vol 29
(6)
◽
pp. 06F202
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Keyword(s):
2008 ◽
Vol 4
(S259)
◽
pp. 541-542
Keyword(s):
1976 ◽
Vol 32
◽
pp. 49-55
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1990 ◽
Vol 48
(1)
◽
pp. 364-365
Keyword(s):