Experimental evaluation method of point spread functions used for proximity effects correction in electron beam lithography
2011 ◽
Vol 29
(6)
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pp. 06F311
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2011 ◽
Vol 29
(6)
◽
pp. 06F902
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2012 ◽
Vol 11
(1)
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pp. 013009
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Keyword(s):
1984 ◽
Vol 42
◽
pp. 468-471
1993 ◽
Vol 11
(6)
◽
pp. 2758
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Keyword(s):
1992 ◽
Vol 50
(1)
◽
pp. 386-387
Keyword(s):
2004 ◽
Vol 130
(1-2)
◽
pp. 111-114
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