Two methods of experimental evaluation of long-range proximity function components in electron-beam lithography
1993 ◽
Vol 11
(6)
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pp. 2758
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Keyword(s):
1996 ◽
Vol 9
(7)
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pp. 565-569
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Keyword(s):
1993 ◽
Vol 20
(3)
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pp. 241-253
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2011 ◽
Vol 29
(6)
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pp. 06F311
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1983 ◽
Vol 41
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pp. 96-99
Keyword(s):
1982 ◽
Vol 21
(4)
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pp. 999-1004
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Keyword(s):
1998 ◽
Vol 16
(6)
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pp. 3158
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