In-situ etch rate study of HfxLayOz in Cl2/BCl3 plasmas using the quartz crystal microbalance

2015 ◽  
Vol 33 (3) ◽  
pp. 031305 ◽  
Author(s):  
Nathan Marchack ◽  
Taeseung Kim ◽  
Hans-Olof Blom ◽  
Jane P. Chang
Keyword(s):  
Quartz Crystal Microbalance ◽  
Etch Rate ◽  
Quartz Crystal ◽  
Rate Study

scholarly journals Synthesis of acrylamide-based block-copolymer brushes under flow: monitoring real-time growth and surface restructuring upon drying

2020 ◽  
Vol 11 (18) ◽  
pp. 3209-3216 ◽  
Author(s):  
Joydeb Mandal ◽  
Andrea Arcifa ◽  
Nicholas D. Spencer
Keyword(s):  
Block Copolymer ◽  
Real Time ◽  
Quartz Crystal Microbalance ◽  
Continuous Flow ◽  
Quartz Crystal ◽  
Water Soluble ◽  
Surface Restructuring ◽  
Flow Monitoring ◽  
Copolymer Brushes

Block-copolymer brushes of water-soluble acrylamides have been synthesised by SI-ATRP under continuous flow and their growth monitored in situ by means of a quartz-crystal microbalance with dissipation (QCM-D).

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