Development of high-vacuum planar magnetron sputtering using an advanced magnetic field geometry

2015 ◽  
Vol 33 (6) ◽  
pp. 063001 ◽  
Author(s):  
Takahiro Ohno ◽  
Daisuke Yagyu ◽  
Shigeru Saito ◽  
Yasunori Ohno ◽  
Hirofumi Nakano ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Magnetron Sputtering ◽  
High Vacuum ◽  
Planar Magnetron ◽  
Field Geometry

Copper Filling of Deep Sub-µm Through-Holes by High-Vacuum Planar Magnetron Sputtering Using Argon Gas with Added Nitrogen: Optimum Quantity of Nitrogen in Argon Gas

2006 ◽  
Vol 45 (2A) ◽  
pp. 736-738 ◽  
Author(s):  
Shigeru Saito ◽  
Yoshio Uhara ◽  
Takahide Uenosono ◽  
Jyunichi Nagata ◽  
Minemasa Oyama ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
High Vacuum ◽  
Argon Gas ◽  
Optimum Quantity ◽  
Planar Magnetron

High-Vacuum Planar Magnetron Sputtering

1993 ◽  
Vol 32 (Part 1, No. 2) ◽  
pp. 902-906 ◽  
Author(s):  
Tatsuo Asamaki ◽  
Tsutomu Miura ◽  
Kohichi Hotate ◽  
Shingo Yonaiyama ◽  
Gen Nakamura ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
High Vacuum ◽  
Planar Magnetron

Magnetic field dependence of AlN film properties in dc planar magnetron sputtering with opposed targets

Vacuum ◽  
1998 ◽  
Vol 51 (4) ◽  
pp. 549-553
Author(s):  
K. Tominaga ◽  
T. Ao ◽  
Y. Sato ◽  
I. Mori ◽  
K. Kusaka ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Magnetron Sputtering ◽  
Field Dependence ◽  
Magnetic Field Dependence ◽  
Film Properties ◽  
Aln Film ◽  
Planar Magnetron

Copper filling of deep sub-μm through-holes by high-vacuum planar magnetron sputtering using argon gas with added oxygen

2009 ◽  
Vol 256 (4) ◽  
pp. 1240-1243 ◽  
Author(s):  
Yoshio Uhara ◽  
Tsubasa Urano ◽  
Masatoshi Itoh ◽  
Hideo Hayashi ◽  
Yousuke Manba ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
High Vacuum ◽  
Argon Gas ◽  
Planar Magnetron

Effects of magnetic field on operation in planar magnetron sputtering.

1986 ◽  
Vol 37 (6) ◽  
pp. 308-312
Author(s):  
Tatsuo FUKAMI ◽  
Fumihiko SHINTANI ◽  
Masahiko NAOE
Keyword(s):  
Magnetic Field ◽  
Magnetron Sputtering ◽  
Planar Magnetron

The influence of pressure and magnetic field on the deposition of epitaxial TiBx thin films from DC magnetron sputtering

Vacuum ◽  
2020 ◽  
Vol 177 ◽  
pp. 109355
Author(s):  
Nils Nedfors ◽  
Daniel Primetzhofer ◽  
Igor Zhirkov ◽  
Justinas Palisaitis ◽  
Per O.Å. Persson ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Thin Films ◽  
Magnetron Sputtering ◽  
Dc Magnetron Sputtering

Jupiter's internal magnetic field geometry relevant to particle trapping

1977 ◽  
Vol 82 (32) ◽  
pp. 5187-5194 ◽  
Author(s):  
Juan G. Roederer ◽  
Mario H. Acuña ◽  
Norman F. Ness
Keyword(s):  
Magnetic Field ◽  
Internal Magnetic Field ◽  
Particle Trapping ◽  
Field Geometry
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