Plasma resistance of sintered and ion-plated yttrium oxyfluorides with various Y, O, and F composition ratios for use in plasma process chamber

2020 ◽  
Vol 38 (4) ◽  
pp. 043003
Author(s):  
Tetsuya Goto ◽  
Yoshinobu Shiba ◽  
Akinobu Teramoto ◽  
Yukio Kishi ◽  
Shigetoshi Sugawa
Keyword(s):  
Plasma Process ◽  
Plasma Resistance ◽  
Composition Ratios

MODELING BIO-OIL GASIFICATION BY A PLASMA PROCESS

2010 ◽  
Vol 14 (1-2) ◽  
pp. 11-27 ◽  
Author(s):  
H. Lorcet ◽  
M. Brothier ◽  
D. Guenadou ◽  
C. Latge ◽  
Armelle Vardelle
Keyword(s):  
Plasma Process ◽  
Bio Oil

scholarly journals Remarkable plasma-resistance performance by nanocrystalline Y2O3·MgO composite ceramics for semiconductor industry applications

2021 ◽  
Vol 11 (1) ◽  
Author(s):  
Hyeon-Myeong Oh ◽  
Young-Jo Park ◽  
Ha-Neul Kim ◽  
Kundan Kumar ◽  
Jae-Woong Ko ◽  
...  
Keyword(s):  
Plasma Etching ◽  
Semiconductor Industry ◽  
High Plasma ◽  
Hot Press ◽  
Composite Ceramics ◽  
Plasma Resistance ◽  
Industry Applications ◽  
Hot Press Sintering ◽  
Resistance Performance ◽  
First Time

AbstractMotivated by recent finding of crystallographic-orientation-dependent etching behavior of sintered ceramics, the plasma resistance of nanocrystalline Y2O3-MgO composite ceramics (YM) was evaluated for the first time. We report a remarkably high plasma etching resistance of nanostructure YM surpassing the plasma resistance of commercially used transparent Y2O3 and MgAl2O4 ceramics. The pore-free YM ceramic with grain sizes of several hundred nm was fabricated by hot press sintering, enabling theoretical maximum densification at low temperature. The insoluble two components effectively suppressed the grain growth by mutual pinning. The engineering implication of the developed YM nanocomposite imparts enhanced mechanical reliability, better cost effectiveness with excellent plasma resistance property over their counterparts in plasma using semiconductor applications.

scholarly journals In-Liquid Plasma Process for Size- and Shape-Controlled Synthesis of Silver Nanoparticles by Controlling Gas Bubbles in Water

Materials ◽  
2018 ◽  
Vol 11 (6) ◽  
pp. 891 ◽  
Author(s):  
Hyun-Jin Kim ◽  
Jun-Goo Shin ◽  
Choon-Sang Park ◽  
Dae Kum ◽  
Bhum Shin ◽  
...  
Keyword(s):  
Silver Nanoparticles ◽  
Gas Bubbles ◽  
Controlled Synthesis ◽  
Plasma Process ◽  
Size And Shape ◽  
Shape Controlled

scholarly journals Outside Front Cover: Plasma Process. Polym. 7/2021

2021 ◽  
Vol 18 (7) ◽  
pp. 2170019
Author(s):  
Hang Chen ◽  
Angjian Wu ◽  
Stéphanie Mathieu ◽  
Peihan Gao ◽  
Xiaodong Li ◽  
...  
Keyword(s):  
Plasma Process ◽  
Front Cover

scholarly journals Outside Front Cover: Plasma Process. Polym. 8/2021

2021 ◽  
Vol 18 (8) ◽  
pp. 2170022
Author(s):  
Yu Zhu ◽  
Zilan Xiong ◽  
Mengqi Li ◽  
Xingyu Chen ◽  
Chen Lu ◽  
...  
Keyword(s):  
Plasma Process ◽  
Front Cover
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