Depth profile analysis of hydrogenated carbon layers on silicon by x‐ray photoelectron spectroscopy, Auger electron spectroscopy, electron energy‐loss spectroscopy, and secondary ion mass spectrometry
1987 ◽
Vol 5
(4)
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pp. 1470-1473
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1996 ◽
Vol 11
(1)
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pp. 229-235
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2015 ◽
2000 ◽
Vol 18
(1)
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pp. 440
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1986 ◽
Vol 4
(6)
◽
pp. 1310
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2015 ◽
1991 ◽
Vol 17
(13)
◽
pp. 965-971
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