Analysis of aluminum nitride epitaxial growth by low pressure metal organic chemical vapor deposition

1996 ◽  
Vol 14 (4) ◽  
pp. 2257-2262 ◽  
Author(s):  
R. C. Buggeln ◽  
M. Meyyappan ◽  
S. J. Shamroth
Keyword(s):  
Chemical Vapor Deposition ◽  
Aluminum Nitride ◽  
Epitaxial Growth ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Low Pressure ◽  
Organic Chemical ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition

Epitaxial Growth and Polarity of ZnO Films on Sapphire (0001) Substrates by Low-Pressure Metal Organic Chemical Vapor Deposition

2003 ◽  
Vol 42 (Part 1, No. 4B) ◽  
pp. 2291-2295 ◽  
Author(s):  
Bao-Ping Zhang ◽  
Le-Hong Manh ◽  
Katsuki Wakatsuki ◽  
Tsuyoshi Ohnishi ◽  
Mikk Lippmaa ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Epitaxial Growth ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Low Pressure ◽  
Organic Chemical ◽  
Zno Films ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition

Selective epitaxial growth of Ge 1−x Sn x on Si by using metal-organic chemical vapor deposition

2017 ◽  
Vol 468 ◽  
pp. 614-619 ◽  
Author(s):  
Tomoya Washizu ◽  
Shinichi Ike ◽  
Yuki Inuzuka ◽  
Wakana Takeuchi ◽  
Osamu Nakatsuka ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Epitaxial Growth ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Selective Epitaxial Growth ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition
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