Characterization of thin, transparent and conductive TiN films prepared by radio frequency sputtering
1998 ◽
Vol 16
(1)
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pp. 200-202
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Keyword(s):
2002 ◽
Vol 58
(s1)
◽
pp. c348-c348
Keyword(s):
2002 ◽
Vol 20
(1)
◽
pp. 159
◽
2016 ◽
Vol 698
◽
pp. 13-18
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