Reactive ion etching of via holes for GaAs high electron mobility transistors and monolithic microwave integrated circuits using Cl2/BCl3/Ar gas mixtures

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.586515 ◽

1993 ◽

Vol 11 (5) ◽

pp. 1879 ◽

Author(s):

K. J. Nordheden

Keyword(s):

Integrated Circuits ◽

Electron Mobility ◽

High Electron Mobility Transistors ◽

High Electron ◽

Microwave Integrated Circuits ◽

High Electron Mobility ◽

Monolithic Microwave Integrated Circuits ◽

Electron Mobility Transistors ◽

Via Holes ◽

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Selectively dry gate recessed GaAs metal–semiconductor field-effect transistors, high electron mobility transistors, and monolithic microwave integrated circuits

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.586465 ◽

1993 ◽

Vol 11 (6) ◽

pp. 2244 ◽

Author(s):

N. I. Cameron

Keyword(s):

Integrated Circuits ◽

Electron Mobility ◽

Field Effect ◽

Field Effect Transistors ◽

High Electron Mobility Transistors ◽

High Electron ◽

Microwave Integrated Circuits ◽

High Electron Mobility ◽

Monolithic Microwave Integrated Circuits ◽

Electron Mobility Transistors

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Low-noise high electron mobility transistors for monolithic microwave integrated circuits

IEEE Electron Device Letters ◽

10.1109/edl.1985.26050 ◽

1985 ◽

Vol 6 (2) ◽

pp. 81-82 ◽

Author(s):

A.K. Gupta ◽

E.A. Sovero ◽

R.L. Pierson ◽

R.D. Stein ◽

R.T. Chen ◽

...

Keyword(s):

Integrated Circuits ◽

Electron Mobility ◽

High Electron Mobility Transistors ◽

Low Noise ◽

High Electron ◽

Microwave Integrated Circuits ◽

High Electron Mobility ◽

Monolithic Microwave Integrated Circuits ◽

Electron Mobility Transistors

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Sub-50nm indium phosphide high electron mobility transistor technology for terahertz monolithic microwave integrated circuits and systems

2013 International Conference on Indium Phosphide and Related Materials (IPRM) ◽

10.1109/iciprm.2013.6562646 ◽

2013 ◽

Author(s):

Stephen Sarkozy ◽

Xiaobing Mei ◽

Wayne Yoshida ◽

Po-Hsin Liu ◽

Ling-Shine Lee ◽

...

Keyword(s):

Integrated Circuits ◽

Indium Phosphide ◽

Electron Mobility ◽

High Electron Mobility Transistor ◽

High Electron ◽

Microwave Integrated Circuits ◽

High Electron Mobility ◽

Monolithic Microwave Integrated Circuits

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Ultrahigh-Speed Integrated Circuits Using InP-Based High-Electron-Mobility Transistors(HEMTs)

10.7567/ssdm.1997.d-10-1 ◽

1997 ◽

Author(s):

Takatomo Enoki ◽

Haruki Yokoyama ◽

Yohtaro Umeda ◽

Taiichi Otsuji

Keyword(s):

Integrated Circuits ◽

Electron Mobility ◽

High Electron Mobility Transistors ◽

High Electron ◽

High Electron Mobility ◽

Electron Mobility Transistors

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High Electron Mobility Transistors Yield Improvement with Ultrasonically Assisted Recess for High-Speed Integrated Circuits

Japanese Journal of Applied Physics ◽

10.1143/jjap.45.3376 ◽

2006 ◽

Vol 45 (4B) ◽

pp. 3376-3379 ◽

Author(s):

Seong-Jin Yeon ◽

Hyungtae Kim ◽

Jongwon Lee ◽

Gyungseon Seol ◽

Kwangseok Seo

Keyword(s):

Integrated Circuits ◽

Electron Mobility ◽

High Electron Mobility Transistors ◽

High Electron ◽

Yield Improvement ◽

High Electron Mobility ◽

Electron Mobility Transistors

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THz Monolithic Integrated Circuits Using InP High Electron Mobility Transistors

IEEE Transactions on Terahertz Science and Technology ◽

10.1109/tthz.2011.2159539 ◽

2011 ◽

Vol 1 (1) ◽

pp. 25-32 ◽

Author(s):

William Deal ◽

X. B. Mei ◽

Kevin M. K. H. Leong ◽

Vesna Radisic ◽

S. Sarkozy ◽

...

Keyword(s):

Integrated Circuits ◽

Electron Mobility ◽

High Electron Mobility Transistors ◽

High Electron ◽

High Electron Mobility ◽

Electron Mobility Transistors ◽

Monolithic Integrated Circuits

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Monolithic integration of light-emitting diodes and power metal-oxide-semiconductor channel high-electron-mobility transistors for light-emitting power integrated circuits in GaN on sapphire substrate

Applied Physics Letters ◽

10.1063/1.4807125 ◽

2013 ◽

Vol 102 (19) ◽

pp. 192107 ◽

Author(s):

Z. Li ◽

J. Waldron ◽

T. Detchprohm ◽

C. Wetzel ◽

R. F. Karlicek ◽

...

Keyword(s):

Integrated Circuits ◽

Sapphire Substrate ◽

Electron Mobility ◽

High Electron Mobility Transistors ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

High Electron ◽

High Electron Mobility ◽

Light Emitting ◽

Electron Mobility Transistors

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Pseudomorphic high electron mobility transistor monolithic microwave integrated circuits reliability study

Microelectronics Reliability ◽

10.1016/s0026-2714(01)00082-8 ◽

2001 ◽

Vol 41 (8) ◽

pp. 1109-1113 ◽

Author(s):

W.T Anderson ◽

J.A Roussos ◽

J.A Mittereder ◽

D.E Ioannou ◽

C Moglestue

Keyword(s):

Integrated Circuits ◽

Electron Mobility ◽

High Electron Mobility Transistor ◽

High Electron ◽

Reliability Study ◽

Microwave Integrated Circuits ◽

High Electron Mobility ◽

Monolithic Microwave Integrated Circuits

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IIA-7 ultra high speed integrated circuits using GaAs/GaAlAs high electron mobility transistors

IEEE Transactions on Electron Devices ◽

10.1109/t-ed.1983.21347 ◽

1983 ◽

Vol 30 (11) ◽

pp. 1569-1569 ◽

Author(s):

C.P. Lee ◽

D.L. Miller ◽

D. Hou ◽

R.J. Anderson

Keyword(s):

Integrated Circuits ◽

Electron Mobility ◽

High Electron Mobility Transistors ◽

High Electron ◽

High Electron Mobility ◽

Electron Mobility Transistors ◽

Ultra High Speed

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Investigation of gate-diode degradation in normally-off p-GaN/AlGaN/GaN high-electron-mobility transistors

Applied Physics Letters ◽

10.1063/1.4935223 ◽

2015 ◽

Vol 107 (19) ◽

pp. 193506 ◽

Author(s):

M. Ťapajna ◽

O. Hilt ◽

E. Bahat-Treidel ◽

J. Würfl ◽

J. Kuzmík

Keyword(s):

Electron Mobility ◽

High Electron Mobility Transistors ◽

High Electron ◽

High Electron Mobility ◽

Electron Mobility Transistors

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