Role of ions in electron cyclotron resonance plasma-enhanced chemical vapor deposition of silicon dioxide
1995 ◽
Vol 13
(1)
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pp. 118
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1993 ◽
Vol 11
(4)
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pp. 1875-1880
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2002 ◽
Vol 235
(1-4)
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pp. 333-339
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1996 ◽
Vol 14
(3)
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pp. 1687
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1995 ◽
Vol 05
(C5)
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pp. C5-671-C5-677
1998 ◽
Vol 16
(3)
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pp. 1912-1916
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1997 ◽
Vol 292
(1-2)
◽
pp. 124-129
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