Surface roughness of SiO[sub 2] from a remote microwave plasma enhanced chemical vapor deposition process

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.590144 ◽

1998 ◽

Vol 16 (4) ◽

pp. 2165 ◽

Author(s):

M. J. Rack

Keyword(s):

Surface Roughness ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Vapor Deposition Process

Download Full-text

Growth of carbon nanotubes using microwave plasma-enhanced chemical vapor deposition process

Materials Chemistry and Physics ◽

10.1016/s0254-0584(03)00314-6 ◽

2003 ◽

Vol 82 (3) ◽

pp. 571-574 ◽

Author(s):

Ruo-Mei Liu ◽

Jyh-Ming Ting

Keyword(s):

Carbon Nanotubes ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Vapor Deposition Process

Download Full-text

Growth and microstructures of carbon nanotube films prepared by microwave plasma enhanced chemical vapor deposition process

Thin Solid Films ◽

10.1016/j.tsf.2006.05.009 ◽

2006 ◽

Vol 515 (4) ◽

pp. 1552-1560 ◽

Author(s):

Sanjay K. Srivastava ◽

V.D. Vankar ◽

V. Kumar

Keyword(s):

Chemical Vapor Deposition ◽

Carbon Nanotube ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Vapor Deposition Process ◽

Download Full-text

Coating of Diamond-Like Carbon Nanofilm on Alumina by Microwave Plasma Enhanced Chemical Vapor Deposition Process

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2012.5384 ◽

2012 ◽

Vol 12 (1) ◽

pp. 642-647 ◽

Author(s):

Chotiwan Rattanasatien ◽

Nattaporn Tonanon ◽

Worawan Bhanthumnavin ◽

Boonchoat Paosawatyanyong

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Diamond Like Carbon ◽

Vapor Deposition Process

Download Full-text

Study on the Interatomic Binding Structure of Diamond Thin-Film Deposited by Microwave Plasma Enhanced Chemical Vapor Deposition Process

The Transactions of The Korean Institute of Electrical Engineers ◽

10.5370/kiee.2019.68.12.1580 ◽

2019 ◽

Vol 68 (12) ◽

pp. 1580-1585

Author(s):

Sang-Bo Han

Keyword(s):

Thin Film ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Diamond Thin Film ◽

Binding Structure ◽

Vapor Deposition Process

Download Full-text

ANALYSIS OF HEAT AND MASS TRANSFER DURING MULTI-WAFER LOW PRESSURE CHEMICAL VAPOR DEPOSITION PROCESS

Proceeding of International Heat Transfer Conference 11 ◽

10.1615/ihtc11.240 ◽

1998 ◽

Author(s):

K.S. Park ◽

M. Choi

Keyword(s):

Mass Transfer ◽

Chemical Vapor Deposition ◽

Heat And Mass Transfer ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Low Pressure ◽

Chemical Vapor Deposition Process ◽

Pressure Chemical ◽

Vapor Deposition Process

Download Full-text

An analysis of the effect of the solid layer for the modified chemical vapor deposition process

Wärme- und Stoffübertragung ◽

10.1007/bf01541187 ◽

1993 ◽

Vol 28 (4) ◽

pp. 169-176 ◽

Author(s):

Y. T. Lin ◽

M. Choi ◽

R. Greif

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Solid Layer ◽

Vapor Deposition Process

Download Full-text

The Modified Chemical Vapor Deposition Process in a Concentric Annulus: An Extension for Focused High-Rate Deposition

Aerosol Science and Technology ◽

10.1080/02786828808959211 ◽

1988 ◽

Vol 9 (3) ◽

pp. 237-249 ◽

Author(s):

M. Fiebig ◽

M. Hilgenstock ◽

H.-A. Riemann

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

High Rate ◽

Chemical Vapor Deposition Process ◽

Concentric Annulus ◽

Vapor Deposition Process

Download Full-text

In Situ Monitoring of the Products from the SiH4 + WF 6 Tungsten Chemical Vapor Deposition Process by Micro‐Volume Mass Spectrometry

Journal of The Electrochemical Society ◽

10.1149/1.2221130 ◽

1993 ◽

Vol 140 (12) ◽

pp. 3588-3590 ◽

Author(s):

Roger W. Cheek ◽

Jeffry A. Kelber ◽

James G. Fleming ◽

Robert S. Blewer ◽

Richard D. Lujan

Keyword(s):

Mass Spectrometry ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

In Situ Monitoring ◽

Chemical Vapor Deposition Process ◽

Vapor Deposition Process

Download Full-text

Effect of Si–H Bond on the Gas-Phase Chemistry of Trimethylsilane in the Hot Wire Chemical Vapor Deposition Process

The Journal of Physical Chemistry A ◽

10.1021/jp203966h ◽

2011 ◽

Vol 115 (37) ◽

pp. 10290-10298 ◽

Author(s):

Y. J. Shi ◽

X. M. Li ◽

R. Toukabri ◽

L. Tong

Keyword(s):

Chemical Vapor Deposition ◽

Gas Phase ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Hot Wire ◽

Gas Phase Chemistry ◽

Phase Chemistry ◽

Vapor Deposition Process

Download Full-text

GaAs crystal growth from coordination compounds using the organometallic chemical vapor deposition process for solar cells

Solar & Wind Technology ◽

10.1016/0741-983x(86)90044-5 ◽

1986 ◽

Vol 3 (1) ◽

pp. 21-25

Author(s):

A. Zaouk ◽

G. Constant

Keyword(s):

Solar Cells ◽

Chemical Vapor Deposition ◽

Crystal Growth ◽

Vapor Deposition ◽

Coordination Compounds ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Gaas Crystal ◽

Vapor Deposition Process

Download Full-text