Coating of Diamond-Like Carbon Nanofilm on Alumina by Microwave Plasma Enhanced Chemical Vapor Deposition Process

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Deposition Process ◽

Diamond Like Carbon ◽

Growth of carbon nanotubes using microwave plasma-enhanced chemical vapor deposition process

Materials Chemistry and Physics ◽

10.1016/s0254-0584(03)00314-6 ◽

2003 ◽

Vol 82 (3) ◽

pp. 571-574 ◽

Cited By ~ 7

Author(s):

Ruo-Mei Liu ◽

Jyh-Ming Ting

Keyword(s):

Carbon Nanotubes ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Deposition Process ◽

Growth and microstructures of carbon nanotube films prepared by microwave plasma enhanced chemical vapor deposition process

Thin Solid Films ◽

10.1016/j.tsf.2006.05.009 ◽

2006 ◽

Vol 515 (4) ◽

pp. 1552-1560 ◽

Cited By ~ 32

Author(s):

Sanjay K. Srivastava ◽

V.D. Vankar ◽

V. Kumar

Keyword(s):

Carbon Nanotube ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Deposition Process ◽

Vapor Deposition Process ◽

Nanotube Films

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

Surface roughness of SiO[sub 2] from a remote microwave plasma enhanced chemical vapor deposition process

10.1116/1.590144 ◽

1998 ◽

Vol 16 (4) ◽

pp. 2165 ◽

Cited By ~ 8

Author(s):

M. J. Rack

Keyword(s):

Surface Roughness ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Deposition Process ◽

Strange hardness characteristic of hydrogenated diamond-like carbon thin film by plasma enhanced chemical vapor deposition process

Applied Physics Letters ◽

10.1063/1.4775372 ◽

2013 ◽

Vol 102 (1) ◽

pp. 011917 ◽

Cited By ~ 23

Author(s):

Neeraj Dwivedi ◽

Sushil Kumar ◽

Hitendra K. Malik

Keyword(s):

Thin Film ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Diamond Like Carbon ◽

Carbon Thin Film ◽

Study on the Interatomic Binding Structure of Diamond Thin-Film Deposited by Microwave Plasma Enhanced Chemical Vapor Deposition Process

The Transactions of The Korean Institute of Electrical Engineers ◽

10.5370/kiee.2019.68.12.1580 ◽

2019 ◽

Vol 68 (12) ◽

pp. 1580-1585

Author(s):

Sang-Bo Han

Keyword(s):

Thin Film ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Deposition Process ◽

Diamond Thin Film ◽

Binding Structure ◽

ANALYSIS OF HEAT AND MASS TRANSFER DURING MULTI-WAFER LOW PRESSURE CHEMICAL VAPOR DEPOSITION PROCESS

Proceeding of International Heat Transfer Conference 11 ◽

10.1615/ihtc11.240 ◽

1998 ◽

Author(s):

K.S. Park ◽

M. Choi

Keyword(s):

Mass Transfer ◽

Heat And Mass Transfer ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Low Pressure ◽

Pressure Chemical ◽

An analysis of the effect of the solid layer for the modified chemical vapor deposition process

Wärme- und Stoffübertragung ◽

10.1007/bf01541187 ◽

1993 ◽

Vol 28 (4) ◽

pp. 169-176 ◽

Cited By ~ 5

Author(s):

Y. T. Lin ◽

M. Choi ◽

R. Greif

Keyword(s):

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Solid Layer ◽

The Modified Chemical Vapor Deposition Process in a Concentric Annulus: An Extension for Focused High-Rate Deposition

Aerosol Science and Technology ◽

10.1080/02786828808959211 ◽

1988 ◽

Vol 9 (3) ◽

pp. 237-249 ◽

Cited By ~ 18

Author(s):

M. Fiebig ◽

M. Hilgenstock ◽

H.-A. Riemann

Keyword(s):

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

High Rate ◽

Concentric Annulus ◽

In Situ Monitoring of the Products from the SiH4 + WF 6 Tungsten Chemical Vapor Deposition Process by Micro‐Volume Mass Spectrometry

Journal of The Electrochemical Society ◽

10.1149/1.2221130 ◽

1993 ◽

Vol 140 (12) ◽

pp. 3588-3590 ◽

Cited By ~ 8

Author(s):

Roger W. Cheek ◽

Jeffry A. Kelber ◽

James G. Fleming ◽

Robert S. Blewer ◽

Richard D. Lujan

Keyword(s):

Mass Spectrometry ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

In Situ Monitoring ◽

Effect of Si–H Bond on the Gas-Phase Chemistry of Trimethylsilane in the Hot Wire Chemical Vapor Deposition Process

The Journal of Physical Chemistry A ◽

10.1021/jp203966h ◽

2011 ◽

Vol 115 (37) ◽

pp. 10290-10298 ◽

Cited By ~ 17

Author(s):

Y. J. Shi ◽

X. M. Li ◽

R. Toukabri ◽

L. Tong

Keyword(s):

Gas Phase ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Hot Wire ◽

Gas Phase Chemistry ◽

Phase Chemistry ◽