Role of high aspect-ratio thin-film metal deposition in Cu back-end-of-line technology
2020 ◽
Vol 38
(5)
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pp. 053402
2007 ◽
Vol 133
(1)
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pp. 259-265
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2016 ◽
Vol 28
(7)
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pp. 5308-5314
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2007 ◽
Vol 25
(4)
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pp. 1227
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