Investigation of direct milling of micro-optical elements with continuous relief on a substrate by focused ion beam technology

2000 ◽  
Vol 39 (11) ◽  
pp. 3008 ◽  
Author(s):  
Fu Yongqi
2020 ◽  
Vol 45 (5) ◽  
pp. 1184 ◽  
Author(s):  
Simon Ristok ◽  
Marcel Roeder ◽  
Simon Thiele ◽  
Mario Hentschel ◽  
Thomas Guenther ◽  
...  

2014 ◽  
Author(s):  
A. Vijayakumar ◽  
Ulrike Eigenthaler ◽  
Kahraman Keskinbora ◽  
Gayathri M. Sridharan ◽  
V. Pramitha ◽  
...  

2016 ◽  
Vol 2 (1) ◽  
Author(s):  
Gediminas Seniutinas ◽  
Gediminas Gervinskas ◽  
Jose Anguita ◽  
Davit Hakobyan ◽  
Etienne Brasselet ◽  
...  

AbstractFocused ion beam (FIB) milling with a 10 nm resolution is used to directly write metallic metasurfaces and micro-optical elements capable to create structured light fields. Surface density of fabricated nano-features, their edge steepness as well as ion implantation extension around the cut line depend on the ion beam intensity profile. The FIB beam intensity cross section was evaluated using atomic force microscopy (AFM) scans of milled line arrays on a thin Pt film. Approximation of two Gaussian intensity distributions describes the actual beam profile composed of central high intensity part and peripheral wings. FIB fabrication reaching aspect ratio of 10 in gold film is demonstrated.


2002 ◽  
Vol 733 ◽  
Author(s):  
Brock McCabe ◽  
Steven Nutt ◽  
Brent Viers ◽  
Tim Haddad

AbstractPolyhedral Oligomeric Silsequioxane molecules have been incorporated into a commercial polyurethane formulation to produce nanocomposite polyurethane foam. This tiny POSS silica molecule has been used successfully to enhance the performance of polymer systems using co-polymerization and blend strategies. In our investigation, we chose a high-temperature MDI Polyurethane resin foam currently used in military development projects. For the nanofiller, or “blend”, Cp7T7(OH)3 POSS was chosen. Structural characterization was accomplished by TEM and SEM to determine POSS dispersion and cell morphology, respectively. Thermal behavior was investigated by TGA. Two methods of TEM sample preparation were employed, Focused Ion Beam and Ultramicrotomy (room temperature).


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