Effective aluminum oxide thin films deposition using reactive pulsed magnetron sputtering: possibilities and limitations

2013 ◽  
Author(s):  
Maciej Gruszka ◽  
Witold Posadowski ◽  
Zuzanna Sidor ◽  
Anna Piotrowska ◽  
Artur Wiatrowski
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Aluminum Oxide ◽  
Oxide Thin Films ◽  
Pulsed Magnetron

Surface roughness of aluminum oxide thin films deposited by DC and RF reactive magnetron sputtering

2018 ◽  
Vol 5 (7) ◽  
pp. 15228-15232 ◽  
Author(s):  
Chatpawee Hom-on ◽  
Mati Horprathum ◽  
Pitak Eiamchai ◽  
Sakson Limwichean ◽  
Viyapol Patthanasettakul ◽  
...  
Keyword(s):  
Thin Films ◽  
Surface Roughness ◽  
Magnetron Sputtering ◽  
Aluminum Oxide ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Oxide Thin Films

The effect of pulsed magnetron sputtering on the properties of indium tin oxide thin films

2003 ◽  
Vol 171 (1-3) ◽  
pp. 29-33 ◽  
Author(s):  
Man-Soo Hwang ◽  
Hye Jung Lee ◽  
Heui Seob Jeong ◽  
Yong Woon Seo ◽  
Sang Jik Kwon
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxide Thin Films ◽  
Pulsed Magnetron
Sign in / Sign up

Export Citation Format

Share Document