Preparation of thin-film oxide superconductor, Y1Ba2Cu3O7-delta by facing-targets sputtering deposition

1990 ◽  
Author(s):  
Yasuo Takagi
Keyword(s):  
Thin Film ◽  
Oxide Superconductor ◽  
Sputtering Deposition

Sculptured thin film vanadium dioxide thermochromic coatings grown by oblique angle deposition: investigation of transmittance response and modulation enhancement by experiment and theoretical modeling

2021 ◽  
Vol 9 (38) ◽  
pp. 13304-13320
Author(s):  
Saranya Bhupathi ◽  
Mohammad Abutoama ◽  
Yi Long ◽  
Ibrahim Abdulhalim
Keyword(s):  
Thin Film ◽  
Heat Treatment ◽  
Vanadium Dioxide ◽  
Theoretical Modeling ◽  
Optical Measurements ◽  
Oblique Angle Deposition ◽  
Oblique Angle ◽  
Smart Window ◽  
Sputtering Deposition ◽  
Angle Deposition

Fabrication of STF VO2 by an industrially viable sputtering deposition following heat-treatment, and optical measurements for thermochromic smart window application.

Preparation of Multielements Mixture Thin Film by One-Step Process Sputtering Deposition Using Mixture Powder Target

2020 ◽  
pp. 1-5
Author(s):  
Hiroharu Kawasaki ◽  
Tamiko Ohshima ◽  
Yoshihito Yagyu ◽  
Takeshi Ihara ◽  
Yoshiaki Suda
Keyword(s):  
Thin Film ◽  
Sputtering Deposition ◽  
Step Process ◽  
Powder Target ◽  
One Step

The effect of charged particles when preparing ZnO thin film by ion beam sputtering deposition

1988 ◽  
Vol 33-34 ◽  
pp. 1114-1119 ◽  
Author(s):  
Yoshihiko Suzuki ◽  
Tsutom Yotsuya ◽  
Katsumi Takiguchi ◽  
Masaaki Yoshitake ◽  
Soichi Ogawa
Keyword(s):  
Thin Film ◽  
Ion Beam ◽  
Charged Particles ◽  
Zno Thin Film ◽  
Ion Beam Sputtering ◽  
Sputtering Deposition ◽  
Beam Sputtering
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