Image-based overlay and alignment metrology through optically opaque media with sub-surface probe microscopy

2018 ◽  
Author(s):  
Daniele Piras ◽  
Hamed Sadeghian ◽  
Abbas Mohtashami ◽  
Maarten van Es
Keyword(s):  
Probe Microscopy ◽  
Surface Probe

More Than a Surface Probe: Investigation of Subsurface Charging in Buried Oxide Layers in Silicon Using Kelvin Probe Microscopy

2004 ◽  
Vol 10 (S02) ◽  
pp. 1090-1091
Author(s):  
Marion A. Stevens-Kalceff
Keyword(s):  
Kelvin Probe ◽  
Oxide Layers ◽  
Probe Microscopy ◽  
Kelvin Probe Microscopy ◽  
Buried Oxide ◽  
Surface Probe ◽  
Probe Investigation

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

scholarly journals Plutonium Dedicated Surface Probe Microscopy Capability

2020 ◽  
Author(s):  
Michael Bryant ◽  
Miles Beaux ◽  
Victor Siller ◽  
Igor Usov
Keyword(s):  
Probe Microscopy ◽  
Surface Probe

Unique sequence-dependent properties of trinucleotide repeat monolayers: electrochemical, electrical, and topographic characterization

2020 ◽  
Vol 8 (24) ◽  
pp. 5225-5233 ◽  
Author(s):  
Narges Asefifeyzabadi ◽  
Motahareh Taki ◽  
Madison Funneman ◽  
Tingjie Song ◽  
Mohtashim Hassan Shamsi
Keyword(s):  
Trinucleotide Repeat ◽  
Gold Surface ◽  
Unique Sequence ◽  
Electrochemical Methods ◽  
Probe Microscopy ◽  
Surface Probe ◽  
Sequence Dependent

The sequence-dependent properties of the surface-assembled trinucleotide repeat interface on a gold surface were explored by electrochemical methods and surface probe microscopy.

Chemical etching of nanocomposite metal-semiconductor films monitored by Raman spectroscopy and surface probe microscopy

2008 ◽  
Author(s):  
Christopher C. Perry ◽  
Tina Brower ◽  
Chichang Zhang ◽  
Emanuel Waddell ◽  
Clayton W. Bates ◽  
...  
Keyword(s):  
Raman Spectroscopy ◽  
Chemical Etching ◽  
Semiconductor Films ◽  
Probe Microscopy ◽  
Surface Probe

The Role of Scanning Probe Microscopy in Drug Delivery Research

1996 ◽  
Vol 13 (3-4) ◽  
pp. 225-256 ◽  
Author(s):  
Kevin M. Shakesheff ◽  
Martyn C. Davies ◽  
Clive J. Roberts ◽  
Saul J. B. Tendler ◽  
Philip M. Williams
Keyword(s):  
Drug Delivery ◽  
Scanning Probe Microscopy ◽  
Scanning Probe ◽  
Probe Microscopy

Extending Electrical Scanning Probe Microscopy Measurements of Semiconductor Devices Using Microwave Impedance Microscopy

2015 ◽  
Author(s):  
Benedict Drevniok ◽  
St. John Dixon-Warren ◽  
Oskar Amster ◽  
Stuart L Friedman ◽  
Yongliang Yang
Keyword(s):  
Scanning Probe Microscopy ◽  
Semiconductor Devices ◽  
Cmos Image Sensor ◽  
Image Sensor ◽  
Scanning Probe ◽  
Cross Sectional ◽  
Probe Microscopy ◽  
Dopant Profiling ◽  
Capacitance Voltage

Abstract Scanning microwave impedance microscopy was used to analyze a CMOS image sensor sample to reveal details of the dopant profiling in planar and cross-sectional samples. Sitespecific capacitance-voltage spectroscopy was performed on different regions of the samples.

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