White-light Mueller-matrix Fourier scatterometry for the characterization of nanostructures with large parameter spaces
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2018 ◽
Vol 101
(11)
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pp. 4916-4920
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2019 ◽
Vol 371
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pp. 355-364
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2020 ◽
Vol 813
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pp. 152235
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Vol 281
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pp. 5360-5363
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Vol 834
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pp. 154804
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