Design and fabrication of cantilevered fiber-to-waveguide mode size converter for thin-film lithium niobate photonic integrated circuits

2020 ◽  
Author(s):  
Guang Qian ◽  
Lexu Huang ◽  
Fengjie Zhou ◽  
Jie Tang ◽  
Xiangfei Chen ◽  
...  
Keyword(s):  
Thin Film ◽  
Lithium Niobate ◽  
Integrated Circuits ◽  
Waveguide Mode ◽  
Photonic Integrated Circuits ◽  
Mode Size

scholarly journals Wafer-scale low-loss lithium niobate photonic integrated circuits

2020 ◽  
Author(s):  
Kevin Luke ◽  
Prashanta Kharel ◽  
Christian Reimer ◽  
Lingyan He ◽  
Marko Loncar ◽  
...  
Keyword(s):  
Lithium Niobate ◽  
Integrated Circuits ◽  
Photonic Integrated Circuits ◽  
Low Loss ◽  
Wafer Scale

scholarly journals Thin film wavelength converters for photonic integrated circuits

Optica ◽  
2016 ◽  
Vol 3 (5) ◽  
pp. 531 ◽  
Author(s):  
Lin Chang ◽  
Yifei Li ◽  
Nicolas Volet ◽  
Leiran Wang ◽  
Jon Peters ◽  
...  
Keyword(s):  
Thin Film ◽  
Integrated Circuits ◽  
Photonic Integrated Circuits ◽  
Wavelength Converters

scholarly journals Gigahertz Phononic Integrated Circuits on Thin-Film Lithium Niobate on Sapphire

2021 ◽  
Vol 15 (1) ◽  
Author(s):  
Felix M. Mayor ◽  
Wentao Jiang ◽  
Christopher J. Sarabalis ◽  
Timothy P. McKenna ◽  
Jeremy D. Witmer ◽  
...  
Keyword(s):  
Thin Film ◽  
Lithium Niobate ◽  
Integrated Circuits

scholarly journals Heterogeneous integration of lithium niobate and silicon nitride waveguides for wafer-scale photonic integrated circuits on silicon

2017 ◽  
Vol 42 (4) ◽  
pp. 803 ◽  
Author(s):  
Lin Chang ◽  
Martin H. P. Pfeiffer ◽  
Nicolas Volet ◽  
Michael Zervas ◽  
Jon D. Peters ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Lithium Niobate ◽  
Integrated Circuits ◽  
Photonic Integrated Circuits ◽  
Heterogeneous Integration ◽  
Wafer Scale

scholarly journals Low-Loss Lithium Niobate on Insulator (LNOI) Waveguides of a 10 cm-Length and a Sub-Nanometer Surface Roughness

2018 ◽  
Author(s):  
Rongbo Wu ◽  
Min Wang ◽  
Jian Xu ◽  
Jia Qi ◽  
Wei Chu ◽  
...  
Keyword(s):  
Surface Roughness ◽  
Lithium Niobate ◽  
Integrated Circuits ◽  
Large Scale ◽  
Photonic Integrated Circuits ◽  
Propagation Loss ◽  
Direct Writing ◽  
Laser Direct Writing ◽  
Low Loss ◽  
Atomic Force

We develop a technique for realizing lithium niobate on insulator (LNOI) waveguides of a multi-centimeter-length with a propagation loss as low as 0.027 dB/cm. Our technique relies on patterning a chromium (Cr) thin film coated on the top surface of LNOI into a hard mask with a femtosecond laser followed by the chemo-mechanical polishing for structuring the LNOI into the waveguides. The surface roughness on the waveguides is determined to be 0.452 nm with an atomic force microscope (AFM). The approach is compatible with other surface patterning technologies such as optical and electron beam lithographies or laser direct writing, enabling high-throughput manufacturing of large-scale LNOI-based photonic integrated circuits.

Sign in / Sign up

Export Citation Format

Share Document