Plasma assisted particle contamination control: plasma charging dependence on particle morphology

Author(s):  
Judith van Huijstee ◽  
Boy van Minderhout ◽  
Robert M. H. Rompelberg ◽  
Paul Blom ◽  
Ton Peijnenburg ◽  
...  
2015 ◽  
Vol 4 (2) ◽  
pp. 304 ◽  
Author(s):  
Bill Chiu ◽  
Shih-Cheng Hu ◽  
Angus Shiue ◽  
Yu-Yun Shiue ◽  
Zhe-Yu Huang

The trend toward narrower line width in semiconductor manufacturing has made contamination control more and more important. The presence of moisture in wafer containers, such as front opening unified pods (FOUP), can lead to the native oxide residues growth, metal corrosion, and thin film cracking on wafer surfaces. Accordingly, decreasing contamination methods and improving factory efficiency are continuously researched. Single or multi-layer particulate shields on top of wafers in FOUPs may be used to prevent pollutant accumulation. In addition, point-of-use (POU) filtration may also been used to control particle contamination in FOUPs during wafer transformation and storage. The demand for stricter filtration led to the usage of 0.10 and 0.20 µm membranes to control the contamination. However, with the introduction of finer membranes end users may have concerns about deleterious remainders on wafers from undergoing filtration. There are a total of 25 pieces of wafers in the FOUP and the arrangement is from the bottom (wafer No. 1) to the top (wafer No. 25) with arising manner. Purging FOUPs to expel moisture vapors with Clean Dry Air (CDA) is one of the most popular methods.There was no previous research for investigating the purge performance on new-generation 450mm FOUPs. This research aims to study main factors influencing the performance of the purge system on 450mm FOUPs, including moisture concentration, CDA flow rate, and filter pressure.


2007 ◽  
Vol 31 (6) ◽  
pp. 522-530 ◽  
Author(s):  
Kwang-Chul Noh ◽  
Hyeon-Cheol Lee ◽  
Dae-Young Kim ◽  
Myung-Do Oh

2002 ◽  
Vol 41 (Part 1, No. 9) ◽  
pp. 5835-5840
Author(s):  
Kiminobu Akeno ◽  
Munehiro Ogasawara ◽  
Kenji Ooki ◽  
Toru Tojo ◽  
Ryoichi Hirano ◽  
...  

Author(s):  
Mark A. van de Kerkhof ◽  
Tjarko van Empel ◽  
Michael Lercel ◽  
Christophe Smeets ◽  
Ferdi van de Wetering ◽  
...  

Author(s):  
Mark A. van de Kerkhof ◽  
Andrei Yakunin ◽  
Vladimir Kvon ◽  
Ferdi van de Wetering ◽  
Selwyn Cats ◽  
...  

1988 ◽  
Vol 43 (5) ◽  
pp. 991-1016 ◽  
Author(s):  
Sangtae Kim ◽  
Christopher J. Lawrence

2021 ◽  
Vol 64 (1) ◽  
pp. 1-17
Author(s):  
Dilip Ashtekar

Abstract Currently, limited guidance is available for the contamination control of visible particles for the manufacture of sterile devices; thus, a comprehensive guidance is warranted. Sterile devices require stringent control of visible particulates to ensure proper functionality, performance assurance of sterility, reliability, patient safety, efficacy, and product quality. This paper outlines practical and science-based strategies to prevent/minimize visible particle contamination from non-process related extrinsic and process related intrinsic sources. Witness plates are proposed as a comprehensive strategy for the real time detection of visible particles, sources of extrinsic and intrinsic visible particles, and methods to identify particle types. Implementing the control measures described herein, which include air ionization units for the control and neutralization of static charges, would maximize device yield and quality, thus reducing rework and leading to increased profitability. Installing validated air ionization systems at appropriate manufacturing and processing locations, storage, product transfer areas, and gown-up rooms can significantly reduce visible particle contamination accumulation, dispersion, and yield losses. Implementing effective material transfer practices can further minimize the risk of introduction of unwanted particles and particle dispersion within classified areas. Also described are additional control measures, such as material systems and supply chain controls, good facility design, gowning practices, manufacturing equipment and tool controls, and manual visual inspections which would further contribute to the overall reduction of particle burden. Crucial elements of an effective particle removal process are the dry and wet cleaning processes and the facility surveillance program. Process-product-particle traceability matrices can serve as effective tools to promptly identify trends and reduce device conformity defects. For this paper, the meaning of the term particle only includes particulates and particulate matter. Microbial contamination control approaches, including facility decontamination, are outside the scope of this paper.


Author(s):  
Job Beckers ◽  
Boy van Minderhout ◽  
Paul Blom ◽  
Gerrit Kroesen ◽  
Ton Peijnenburg

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