Effective data sampling techniques for machine learning OPC in full chip production
2019 ◽
Vol 8
(4)
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pp. 627
2017 ◽
Vol 16
(5)
◽
pp. 630-646
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Keyword(s):
2009 ◽
Vol 19
(02)
◽
pp. 67-89
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2022 ◽
Vol 2161
(1)
◽
pp. 012072