Research on removal function and ion beam figuring process for ultra-precision manufacturing optical components

2021 ◽  
Author(s):  
Xiaojing Li ◽  
Dasen Wang ◽  
Fengming Nie ◽  
pengfei wu ◽  
shiyan zhao
2021 ◽  
Vol 21 (9) ◽  
pp. 4735-4739
Author(s):  
Sung-Taek Jung ◽  
Hyun-Jeong Kim ◽  
Eun-Chan Wi ◽  
Jung-Shik Kong ◽  
Joo-Hyung Lee ◽  
...  

Recently, the technology of the industry has been increasing for diffractive optical elements, holograms, optical components, and next-generation display components. The advanced high value-added industry is designing fine patterns on ultra-precision optical components and applying them to various industries. In the case of the ultra-fine pattern, a contact-type machining technique is required because it requires a precise pattern in nano-scale units. In this paper, the fabrication technology of ultra-precision diamond which is essential in the ultra-precision processing technology was suggested. The material used in the experiment was a single-crystal diamond tool (SCD), and the equipment for machining the SCD used a focused ion beam (FEI COMPANY, system Nova 600) equipment. The back fire method was applied without metal coating in order to carry out the process study and the focused beam of 30 keV Ga+ ions were carried out processing for various fabrication of diamond cutting tools. As a result of applying the backfire method through the process experiment, the cutting edge width of the ultra-precision diamond tool was verified 275 nm.


1995 ◽  
Vol 34 (12) ◽  
pp. 3565 ◽  
Author(s):  
Steven C. Fawcett

2012 ◽  
Author(s):  
Young-Sik Ghim ◽  
Shin-Jae You ◽  
Hyug-Gyo Rhee ◽  
Ho-Soon Yang ◽  
Yun-Woo Lee

2020 ◽  
Vol 10 (1) ◽  
Author(s):  
Tianyi Wang ◽  
Lei Huang ◽  
Hyukmo Kang ◽  
Heejoo Choi ◽  
Dae Wook Kim ◽  
...  

2021 ◽  
Vol 8 (2) ◽  
pp. 021303
Author(s):  
Mikel Larrañaga-Altuna ◽  
Alaitz Zabala ◽  
Iñigo Llavori ◽  
Oliver Pearce ◽  
Dinh T. Nguyen ◽  
...  

1998 ◽  
Vol 546 ◽  
Author(s):  
D. P. Adams ◽  
G. L. Benavides ◽  
M. J. vasile

AbstractThis work combines focused ion beam sputtering and ultra-precision machining for microfabrication of metal alloys and polymers. Specifically, micro-end mills are made by Ga ion beam sputtering of a cylindrical tool shank. Using an ion energy of 20keV, the focused beam defines the tool cutting edges that have submicrometer radii of curvature. We demonstrate 25μm diameter micromilling tools having 2, 4 and 5 cutting edges. These tools fabricate fine channels, 26–28 microns wide, in 6061 aluminum, brass, and polymethyl methacrylate. Micro-tools are structurally robust and operate for more than 5 hours without fracture.


2014 ◽  
Vol 625 ◽  
pp. 489-495
Author(s):  
Ling Bao Kong ◽  
Ji Bin Li ◽  
Chi Fai Cheung ◽  
Yan Lou ◽  
Chang Sheng Wang ◽  
...  

This paper presents an integrated roller embossing process named Continuous Injection Direct Rolling (CIDR) process. The CIDR process is similar to Continue Casting Direct Rolling (CCDR) process for metal material. The process consists of Plastic Injection Module, Injection Nozzle, Precision Rolling Module, and Automatic Coiling Module. In the proposed CIDR process, the plastic plate with microstructured pattern is produced by the integrated injection and rolling process, which is different from the current rolling or plastic injection process. Some key technologies including injection nozzle design, roller design, roller coupling, and ultra-precision machining of rollers, are presented. An on-machine measurement method is also proposed and presented to avoid the incontinence and errors caused by disassembling the roller workpiece for off-line measurement. The results of the pilot study are also discussed. The research work provides an enabling solution for precision manufacturing plastic plate and film with microstructured patterns.


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