Aluminum nitride coatings by reactive pulsed dc magnetron sputtering
2017 ◽
Vol 57
(1S)
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pp. 01AD06
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Keyword(s):
2013 ◽
Vol 586
(1)
◽
pp. 168-178
2005 ◽
Vol 38
(11)
◽
pp. 1769-1780
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2017 ◽
Vol 4
(5)
◽
pp. 6466-6471
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Keyword(s):
2013 ◽
Vol 271
◽
pp. 216-222
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