Effect of sputtering power on the properties of ZnO:Ga transparent conductive oxide films deposited by pulsed DC magnetron sputtering with a rotating cylindrical target

2013 ◽  
Vol 271 ◽  
pp. 216-222 ◽  
Author(s):  
Kyung-Jun Ahn ◽  
Ji-Hyeon Park ◽  
Beom-Ki Shin ◽  
Woong Lee ◽  
Geun Young Yeom ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Oxide Films ◽  
Transparent Conductive Oxide ◽  
Dc Magnetron Sputtering ◽  
Pulsed Dc ◽  
Sputtering Power ◽  
Conductive Oxide ◽  
Cylindrical Target ◽  
Pulsed Dc Magnetron Sputtering

Effects of sputtering power toward the Al-doped ZnO thin Film prepared by pulsed DC magnetron sputtering

2017 ◽  
Vol 4 (5) ◽  
pp. 6466-6471 ◽  
Author(s):  
Kittikhun Seawsakul ◽  
Mati Horprathum ◽  
Pitak Eiamchai ◽  
Viyapol Pattantsetakul ◽  
Saksorn Limwichean ◽  
...  
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Zno Thin Film ◽  
Dc Magnetron Sputtering ◽  
Pulsed Dc ◽  
Sputtering Power ◽  
Doped Zno ◽  
Pulsed Dc Magnetron Sputtering

Comparative study on early stages of film growth for transparent conductive oxide films deposited by dc magnetron sputtering

2008 ◽  
Vol 516 (14) ◽  
pp. 4598-4602 ◽  
Author(s):  
Yasushi Sato ◽  
Mikihiro Taketomo ◽  
Norihiro Ito ◽  
Amica Miyamura ◽  
Yuzo Shigesato
Keyword(s):  
Magnetron Sputtering ◽  
Comparative Study ◽  
Film Growth ◽  
Oxide Films ◽  
Transparent Conductive Oxide ◽  
Dc Magnetron Sputtering ◽  
Early Stages ◽  
Conductive Oxide

Characterization of Ti–Zr–V thin films deposited by DC and unipolar pulsed DC magnetron sputtering

Vacuum ◽  
2021 ◽  
Vol 188 ◽  
pp. 110200
Author(s):  
Sihui Wang ◽  
Wei Wei ◽  
Yonghao Gao ◽  
Haibin Pan ◽  
Yong Wang
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Dc Magnetron Sputtering ◽  
Pulsed Dc ◽  
Pulsed Dc Magnetron Sputtering
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