Haze defect control and containment in a high-volume DRAM manufacturing environment

Mapping Intimacies ◽

10.1117/12.632188 ◽

2005 ◽

Author(s):

Jerry X. Chen ◽

Maihan Nguyen ◽

Osamu Arasaki ◽

Tammy Maraquin ◽

Daniel Sawyer ◽

...

Keyword(s):

High Volume ◽

Manufacturing Environment ◽

Download Full-text

Reduction of CMP μ-scratch induced metal shorts by introduction of a post CMP tungsten plasma clean process in a high volume DRAM manufacturing environment

2004 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (IEEE Cat. No.04CH37530) ◽

10.1109/asmc.2004.1309523 ◽

2004 ◽

Author(s):

H. Ollendorf ◽

S. Cabral ◽

R. Fuller

Keyword(s):

High Volume ◽

Manufacturing Environment

Download Full-text

Test implications of lead-free implementation in a high-volume manufacturing environment

IEEE International Conference on Test, 2005. ◽

10.1109/test.2005.1584023 ◽

2006 ◽

Author(s):

Shu Peng ◽

S. Wong

Keyword(s):

High Volume ◽

Lead Free ◽

Manufacturing Environment

Download Full-text

Dose control strategy using random logic device patterns and massive metrology in a foundry high volume manufacturing environment

10.1109/iwaps54037.2021.9671240 ◽

2021 ◽

Author(s):

Kan Zhou ◽

Xin Guo ◽

Yuyang Bian ◽

Wenzhan Zhou ◽

Yu Zhang ◽

...

Keyword(s):

Control Strategy ◽

High Volume ◽

Logic Device ◽

Manufacturing Environment ◽

Download Full-text

A 25 THz $F_{CO}$ (6.3 fs $R_{ON} * C_{OFF}$) Phase-Change Material RF Switch Fabricated in a High Volume Manufacturing Environment with Demonstrated Cycling > 1 Billion Times

2020 IEEE/MTT-S International Microwave Symposium (IMS) ◽

10.1109/ims30576.2020.9223973 ◽

2020 ◽

Author(s):

Nabil El-Hinnawy ◽

Gregory Slovin ◽

Jefferson Rose ◽

David Howard

Keyword(s):

Phase Change ◽

Phase Change Material ◽

High Volume ◽

Rf Switch ◽

Manufacturing Environment ◽

Change Material

Download Full-text

In-process quality monitoring for the high speed high volume manufacturing environment

Proceedings of IECON '93 - 19th Annual Conference of IEEE Industrial Electronics ◽

10.1109/iecon.1993.339024 ◽

2002 ◽

Author(s):

P.W. Gold

Keyword(s):

High Volume ◽

Process Quality ◽

Quality Monitoring ◽

Manufacturing Environment

Download Full-text

The application of HALT and HASS principles in a high-volume manufacturing environment

Quality and Reliability Engineering International ◽

10.1002/(sici)1099-1638(199811/12)14:6<385::aid-qre217>3.0.co;2-e ◽

1998 ◽

Vol 14 (6) ◽

pp. 385-392 ◽

Author(s):

Simon Prakash

Keyword(s):

High Volume ◽

Manufacturing Environment

Download Full-text

Use of multiple lithography monitors in a defect control strategy for high volume manufacturing

10th Annual IEEE/SEMI. Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 99 Proceedings (Cat. No.99CH36295) ◽

10.1109/asmc.1999.798240 ◽

2003 ◽

Author(s):

L. Bond ◽

D. Sutton ◽

K. Turnquest

Keyword(s):

Control Strategy ◽

High Volume ◽

Download Full-text

Managing high volume advanced VLSI in a manufacturing environment (MOS DRAMs)

[1991 Proceedings] IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ◽

10.1109/asmc.1991.167377 ◽

2002 ◽

Author(s):

M.T. Flaherty

Keyword(s):

High Volume ◽

Manufacturing Environment

Download Full-text

Patterning hot spot verification using high speed e-beam metrospection with D2DB at foundry high volume manufacturing environment

10.1109/iwaps54037.2021.9671249 ◽

2021 ◽

Author(s):

Fang Wei ◽

Chenming Zhang ◽

Honglin Meng ◽

Zhihao Chu ◽

Chao Huang ◽

...

Keyword(s):

Hot Spot ◽

High Volume ◽

Manufacturing Environment

Download Full-text

A Novel Control Strategy to Improve On-Product Overlay with Context-Based Wafer Grouping for an Advanced Node Logic Layer in High-Volume Manufacturing Environment

10.1109/iwaps54037.2021.9671239 ◽

2021 ◽

Author(s):

Xiaosong Yang ◽

Hai Zhang ◽

Yimin Wu ◽

Liang Wu ◽

Zhonghua Xu ◽

...

Keyword(s):

Control Strategy ◽

High Volume ◽

Manufacturing Environment

Download Full-text