Use of multiple lithography monitors in a defect control strategy for high volume manufacturing

Author(s):  
L. Bond ◽  
D. Sutton ◽  
K. Turnquest
2005 ◽  
Author(s):  
Jerry X. Chen ◽  
Maihan Nguyen ◽  
Osamu Arasaki ◽  
Tammy Maraquin ◽  
Daniel Sawyer ◽  
...  

2020 ◽  
Vol 12 (11) ◽  
pp. 12883-12891 ◽  
Author(s):  
Xuping Liu ◽  
Jihuai Wu ◽  
Guodong Li ◽  
Qiyao Guo ◽  
Zeyu Song ◽  
...  

Author(s):  
Peter H. Meckl ◽  
Young Joo Shin

Many manufacturing devices must execute motions as quickly as possible to achieve profitable high-volume production. This paper develops a control strategy that combines feedforward and feedback control with command shaping. First, the feedback controller is designed to increase damping and eliminate steady-state error. Next, the feedforward controller is designed to speed up the transient response. Finally, an appropriate reference profile is generated using command-shaping techniques to ensure fast point-to-point motions with minimum residual vibration. The particular focus of the paper is to understand the interactions between these individual control components. The resulting control strategy is demonstrated on a model of a high-speed semiconductor manufacturing machine.


2018 ◽  
Vol 30 (49) ◽  
pp. 1805085 ◽  
Author(s):  
Yongguang Tu ◽  
Xiaoyu Yang ◽  
Rui Su ◽  
Deying Luo ◽  
Yang Cao ◽  
...  

Author(s):  
Young Joo Shin ◽  
Peter H. Meckl

Many manufacturing machines must execute motions as quickly as possible to achieve profitable high-volume production. Most of them exhibit some flexibility, which makes the settling time longer and controller design difficult. This paper develops a control strategy that combines feedforward and feedback control with command shaping for systems with collocated actuator and sensor. First, a feedback controller is designed to increase damping and eliminate steady-state error. Next, an appropriate reference profile is generated using command-shaping techniques to ensure fast point-to-point motions with minimum residual vibration. Finally, a feedforward controller is designed to speed up the transient response. The proposed proportional-integral-derivative (PID) controller design ensures that two important resonant frequencies nearly match, making the design of the input commands much simpler. The resulting control strategy is successfully demonstrated for a generic dimensionless system that incorporates some modeling errors to assess robustness.


Author(s):  
D. E. Fornwalt ◽  
A. R. Geary ◽  
B. H. Kear

A systematic study has been made of the effects of various heat treatments on the microstructures of several experimental high volume fraction γ’ precipitation hardened nickel-base alloys, after doping with ∼2 w/o Hf so as to improve the stress rupture life and ductility. The most significant microstructural chan§e brought about by prolonged aging at temperatures in the range 1600°-1900°F was the decoration of grain boundaries with precipitate particles.Precipitation along the grain boundaries was first detected by optical microscopy, but it was necessary to use the scanning electron microscope to reveal the details of the precipitate morphology. Figure 1(a) shows the grain boundary precipitates in relief, after partial dissolution of the surrounding γ + γ’ matrix.


Author(s):  
M.G. Burke ◽  
M.K. Miller

Interpretation of fine-scale microstructures containing high volume fractions of second phase is complex. In particular, microstructures developed through decomposition within low temperature miscibility gaps may be extremely fine. This paper compares the morphological interpretations of such complex microstructures by the high-resolution techniques of TEM and atom probe field-ion microscopy (APFIM).The Fe-25 at% Be alloy selected for this study was aged within the low temperature miscibility gap to form a <100> aligned two-phase microstructure. This triaxially modulated microstructure is composed of an Fe-rich ferrite phase and a B2-ordered Be-enriched phase. The microstructural characterization through conventional bright-field TEM is inadequate because of the many contributions to image contrast. The ordering reaction which accompanies spinodal decomposition in this alloy permits simplification of the image by the use of the centered dark field technique to image just one phase. A CDF image formed with a B2 superlattice reflection is shown in fig. 1. In this CDF micrograph, the the B2-ordered Be-enriched phase appears as bright regions in the darkly-imaging ferrite. By examining the specimen in a [001] orientation, the <100> nature of the modulations is evident.


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