Large area deposition technique of magnesium oxide thin film for plasma display panel applications

Author(s):  
Young-Wook Choi ◽  
Jeehyun Kim
2009 ◽  
Vol 517 (14) ◽  
pp. 4152-4155 ◽  
Author(s):  
Jung-Woo Ok ◽  
Don-Kyu Lee ◽  
Dong-Hyun Kim ◽  
Hae June Lee ◽  
Ho-Jun Lee ◽  
...  

2012 ◽  
Vol 520 (10) ◽  
pp. 3783-3786 ◽  
Author(s):  
Dong Youn Yoo ◽  
Eugene Chong ◽  
Do Hyung Kim ◽  
Byeong Kwon Ju ◽  
Sang Yeol Lee

2010 ◽  
Vol 2010 ◽  
pp. 1-27 ◽  
Author(s):  
Michael Lorenz ◽  
Holger Hochmuth ◽  
Christoph Grüner ◽  
Helena Hilmer ◽  
Alexander Lajn ◽  
...  

Advanced Pulsed Laser Deposition (PLD) processes allow the growth of oxide thin film heterostructures on large area substrates up to 4-inch diameter, with flexible and controlled doping, low dislocation density, and abrupt interfaces. These PLD processes are discussed and their capabilities demonstrated using selected results of structural, electrical, and optical characterization of superconducting (YBa2Cu3O7−δ), semiconducting (ZnO-based), and ferroelectric (BaTiO3-based) and dielectric (wide-gap oxide) thin films and multilayers. Regarding the homogeneity on large area of structure and electrical properties, flexibility of doping, and state-of-the-art electronic and optical performance, the comparably simple PLD processes are now advantageous or at least fully competitive to Metal Organic Chemical Vapor Deposition or Molecular Beam Epitaxy. In particular, the high flexibility connected with high film quality makes PLD a more and more widespread growth technique in oxide research.


2017 ◽  
Vol 5 (2) ◽  
pp. 339-349 ◽  
Author(s):  
Sung Woon Cho ◽  
Da Eun Kim ◽  
Won Jun Kang ◽  
Bora Kim ◽  
Dea Ho Yoon ◽  
...  

The chemical durability of solution-processed oxide films was engineered via Sn-incorporation and thermal-treatment, which was applied for large-area TFT circuit integration.


Sign in / Sign up

Export Citation Format

Share Document