Based on a new micro programmable grating with changeable blazed angle, the control system was recently designed and developed, enabling the normal operation for the fabricated grating. The basic requirements for the control system are high reliability, efficiency and miniaturization. This paper presents the specific design objectives for the control system according to the grating’s operation characteristics. The whole control system contains three key modules—generator & communication module, high-voltage amplifier module and computer software module. Generator & communication module includes a high-performance microcontroller (C8051F020), a D/a converter (AD7305) and universal serial bus (USB) interface. As for the considered performances, PA69 is complete capable of magnifying the driving voltage signals to drive the grating in high-voltage amplifier module. After the development of the control system, an experiment was performed for investigating the dynamic frequency response of the grating. In conclusion, it has the advantages of wide output of voltage, high frequency response, driving ability in wide capacitive load range and real-time control properties. Hence, it is appropriate for controlling MEMS programmable grating in complicated and dynamic conditions.
Note: Single-polarity high-voltage amplifier to drive coarse-approach slip-stick piezoelectric motors
