Improved in situ detection method for telomeric tandem repeats in metaphase spreads and interphase nuclei

In semiconductor manufacturing, fault detection is an important method for monitoring equipment condition and examining the potential causes of a fault. Vacuum leakage is considered one of the major faults that can occur in semiconductor processing. An unnecessary O2 and N2 mixture, a major component of the atmosphere, creates unexpected process results and hence drops in yield. Vacuum leak detection systems that are currently available in the vacuum industry are based on helium mass spectrometers. They are used for detecting the vacuum leakage at the sole isolation condition where the chamber is fully pumped but cannot be used for in situ detection while the process is ongoing in the chamber. In this article, a chamber vacuum leak detection method named Index Regression and Correction (IRC) is presented, utilizing common data which were gathered during normal chamber operation. This method was developed by analyzing a simple list of data, such as pressure, the temperature of the chamber body, and the position of the auto pressure control (APC), to detect any leakages in the vacuum chamber. The proposed method was experimentally verified and the results showed a high accuracy of up to 97% when a vacuum leak was initiated in the chamber. The proposed method is expected to improve the process yield of the chamber by detecting even small vacuum leakages at very early stages of the process.

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High-accuracy in-situ detection method of monochromator angular vibration

Chinese Optics ◽

10.3788/co.20201301.0156 ◽

2020 ◽

Vol 13 (1) ◽

pp. 156-164 ◽

Cited By ~ 1

Author(s):

樊奕辰 FAN Yi-chen ◽

李中亮 LI Zhong-liang ◽

徐中民 XU Zhong-min ◽

张琦 ZHANG Qi ◽

刘运 LIU Yun ◽

...

Keyword(s):

Detection Method ◽

High Accuracy ◽

Angular Vibration ◽

In Situ Detection

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In-Situ Detection Method of Abnormal Plasma Discharge in Plasma-Assisted Deposition Processes

Transactions on Electrical and Electronic Materials ◽

10.1007/s42341-018-0013-0 ◽

2018 ◽

Vol 19 (2) ◽

pp. 96-100 ◽

Cited By ~ 3

Author(s):

Muhammad Zeeshan Arshad ◽

Sang Jeen Hong

Keyword(s):

Detection Method ◽

Plasma Discharge ◽

Deposition Processes ◽

In Situ Detection

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In Situ Detection Method for Glutaminyl Cyclase Activity in Polyacrylamide Gels

BioTechniques ◽

10.2144/98243bm02 ◽

1998 ◽

Vol 24 (3) ◽

pp. 346-348

Author(s):

Justin B. Houseknecht ◽

Jeffrey S. Temple ◽

Robert C. Bateman

Keyword(s):

Detection Method ◽

Cyclase Activity ◽

Polyacrylamide Gels ◽

Glutaminyl Cyclase ◽

In Situ Detection

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Molecular cytogenetic analysis of supernumerary heterochromatic segments in Rumex acetosa

Genome ◽

10.1139/g99-128 ◽

2000 ◽

Vol 43 (2) ◽

pp. 391-397 ◽

Cited By ~ 11

Author(s):

Fukashi Shibata ◽

Masahiro Hizume ◽

Yuzo Kuroki

Keyword(s):

In Situ Hybridization ◽

Copy Number ◽

Tandem Repeats ◽

Mitotic Chromosomes ◽

Dioecious Plant ◽

Rumex Acetosa ◽

Interphase Nuclei ◽

Heterochromatic Segment ◽

Molecular Cytogenetic

The dioecious plant Rumex acetosa shows intraspecific karyotype variation, caused by supernumerary heterochromatic segments or DAPI (4',6-diamidino-2 phenylindole)-bands at the ends of the short arms of three pairs of autosomes. A DNA sequence (RAE730) specific to the supernumerary heterochromatic segments was cloned and sequenced. RAE730 was about 730 bp and AT-rich (71% AT-content). Using fluorescence in situ hybridization (FISH), RAE730 was localized in the supernumerary DAPI-positive heterochromatic segments on several mitotic chromosomes and chromocenters in interphase nuclei, but not in the DAPI-bands of Y or B chromosomes. RAE730 was tandemly arranged in the genome, and the copy number varied between plants from 40 000 to 304 000 copies per 2C, corresponding to the relative amount of supernumerary heterochromatic segments per genome. These results indicate that the karyotype variation caused by the supernumerary heterochromatic segment was generated by amplification or reduction of the tandem repeats of RAE730. Key words: Rumex acetosa, repetitive sequence, supernumerary heterochromatic segment, intraspecific karyotype variation, DAPI-band.

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