Analysis of free carrier absorption measurement of electronic transport properties of silicon wafers

2008 ◽  
Vol 153 (1) ◽  
pp. 279-281 ◽  
Author(s):  
X. Zhang ◽  
B. Li ◽  
C. Gao
Keyword(s):  
Transport Properties ◽  
Electronic Transport ◽  
Free Carrier ◽  
Silicon Wafers ◽  
Absorption Measurement ◽  
Free Carrier Absorption ◽  
Electronic Transport Properties ◽  
Carrier Absorption

Accuracy of photocarrier radiometric measurement of electronic transport properties of ion-implanted silicon wafers

2004 ◽  
Vol 96 (1) ◽  
pp. 186-196 ◽  
Author(s):  
Bincheng Li ◽  
Derrick Shaughnessy ◽  
Andreas Mandelis ◽  
Jerias Batista ◽  
Jose Garcia
Keyword(s):  
Transport Properties ◽  
Electronic Transport ◽  
Silicon Wafers ◽  
Radiometric Measurement ◽  
Electronic Transport Properties ◽  
Ion Implanted
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