Accuracy of photocarrier radiometric measurement of electronic transport properties of ion-implanted silicon wafers
2010 ◽
Vol 214
◽
pp. 012116
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2008 ◽
Vol 153
(1)
◽
pp. 271-274
1991 ◽
Vol 01
(C6)
◽
pp. C6-277-C6-282
◽
Analysis of free carrier absorption measurement of electronic transport properties of silicon wafers
2008 ◽
Vol 153
(1)
◽
pp. 279-281
◽