Simulation of electrothermal characteristics of MEMS energy changer under different current excitation
Keyword(s):
The simulation model of MEMS energy changer is established by using the finite element analysis software ANSYS. The electrothermal performance of MEMS energy changer under the action of different currents was simulated and analyzed. The bridge area is made of NiCr, and the shape of the bridge area is two different chamfering rectangles. The temperature distribution diagram of MEMS energy changers, the temperature change curve and the phase transition distribution diagram of the bridge region were obtained when the four current values acted on each other. The simulation results are analyzed and discussed.
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