Selective Epitaxial Growth of AlGaAs by Atmospheric Pressure –MOCVD Using Diethylgalliumchloride and Diethylaluminiumchloride

1990 ◽  
Vol 29 (Part 1, No. 8) ◽  
pp. 1408-1414 ◽  
Author(s):  
Ko-ichi Yamaguchi ◽  
Kotaro Okamoto
Keyword(s):  
Epitaxial Growth ◽  
Atmospheric Pressure ◽  
Selective Epitaxial Growth

Characteristics of in-situ phosphorus-doped silicon selective epitaxial growth at atmospheric pressure

2008 ◽  
Vol 310 (21) ◽  
pp. 4507-4510 ◽  
Author(s):  
Tetsuya Ikuta ◽  
Shigeru Fujita ◽  
Hayato Iwamoto ◽  
Shingo Kadomura ◽  
Takayoshi Shimura ◽  
...  
Keyword(s):  
Epitaxial Growth ◽  
Atmospheric Pressure ◽  
Selective Epitaxial Growth ◽  
Doped Silicon ◽  
Phosphorus Doped

Low‐temperature selective epitaxial growth of silicon at atmospheric pressure

1989 ◽  
Vol 54 (26) ◽  
pp. 2689-2691 ◽  
Author(s):  
T. O. Sedgwick ◽  
M. Berkenblit ◽  
T. S. Kuan
Keyword(s):  
Low Temperature ◽  
Epitaxial Growth ◽  
Atmospheric Pressure ◽  
Selective Epitaxial Growth

In situ arsenic-doped Si1−yCy selective epitaxial growth under atmospheric pressure

2008 ◽  
Vol 92 (4) ◽  
pp. 042109 ◽  
Author(s):  
Tetsuya Ikuta ◽  
Shigeru Fujita ◽  
Hayato Iwamoto ◽  
Shingo Kadomura ◽  
Takayoshi Shimura ◽  
...  
Keyword(s):  
Epitaxial Growth ◽  
Atmospheric Pressure ◽  
Selective Epitaxial Growth

In Situ Doped Si Selective Epitaxial Growth at Low Temperatures by Atmospheric Pressure Plasma CVD

2019 ◽  
Vol 25 (8) ◽  
pp. 309-315 ◽  
Author(s):  
Takayuki Ohnishi ◽  
Yutaka Kirihata ◽  
Hiromasa Ohmi ◽  
Hiroaki Kakiuchi ◽  
Kiyoshi Yasutake
Keyword(s):  
Epitaxial Growth ◽  
Atmospheric Pressure ◽  
Low Temperatures ◽  
Atmospheric Pressure Plasma ◽  
Plasma Cvd ◽  
Selective Epitaxial Growth ◽  
Pressure Plasma

Modeling of silicon epitaxial growth with SiHCl3 in a CVD barrel reactor at atmospheric pressure

1999 ◽  
Vol 09 (PR8) ◽  
pp. Pr8-221-Pr8-228
Author(s):  
E. de Paola ◽  
P. Duverneuil ◽  
A. Langlais ◽  
M. Nguyen
Keyword(s):  
Epitaxial Growth ◽  
Atmospheric Pressure ◽  
Barrel Reactor
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