Characterization of Si/SiGe Strained-Layer Superlattices Grown by an Ultrahigh Vacuum/Chemical Vapor Deposition Technique

1994 ◽  
Vol 33 (Part 1, No. 4A) ◽  
pp. 1787-1792 ◽  
Author(s):  
Ting-Chang Chang ◽  
Chun-Yen Chang ◽  
Tz-Guei Jung ◽  
Wen-Chung Tsai ◽  
Guo-Wei Huang ◽  
...  
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