A Comparison of the Effects of RF Plasma Discharge and Ion Beam Supply on the Growth of Cubic Boron Nitride Films Formed by Laser Physical Vapor Deposition

1994 ◽  
Vol 33 (Part 1, No.1A) ◽  
pp. 266-269 ◽  
Author(s):  
Kayo Kaneda ◽  
Kimihiro Shibata
Keyword(s):  
Boron Nitride ◽  
Vapor Deposition ◽  
Physical Vapor Deposition ◽  
Ion Beam ◽  
Cubic Boron Nitride ◽  
Plasma Discharge ◽  
Rf Plasma ◽  
Rf Plasma Discharge ◽  
Boron Nitride Films

Fundamental research on the deposition of cubic boron nitride films on curved substrates by ion-beam-assisted vapor deposition

1993 ◽  
Vol 228 (1-2) ◽  
pp. 97-99 ◽  
Author(s):  
M. Sueda ◽  
T. Kobayashi ◽  
H. Tsukamoto ◽  
T. Rokkaku ◽  
S. Morimoto ◽  
...  
Keyword(s):  
Boron Nitride ◽  
Vapor Deposition ◽  
Ion Beam ◽  
Cubic Boron Nitride ◽  
Fundamental Research ◽  
Boron Nitride Films

Thermal Stability of Cubic Boron Nitride Films Deposited by Chemical Vapor Deposition.

ChemInform ◽  
2007 ◽  
Vol 38 (2) ◽  
Author(s):  
J. Yu ◽  
Z. Zheng ◽  
H. C. Ong ◽  
K. Y. Wong ◽  
S. Matsumoto ◽  
...  
Keyword(s):  
Thermal Stability ◽  
Chemical Vapor Deposition ◽  
Boron Nitride ◽  
Vapor Deposition ◽  
Cubic Boron Nitride ◽  
Chemical Vapor ◽  
Boron Nitride Films ◽  
Thermal Stability Of
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