Atomic Force Microscopy Investigation of Tensile-Stressed Silicon Grown by Rapid Thermal Chemical Vapour Deposition onSi0.68Ge0.32Relaxed Pseudo-substrates

1994 ◽  
Vol 33 (Part 1, No. 12A) ◽  
pp. 6437-6442 ◽  
Author(s):  
Frederic Chollet ◽  
Patricia Warren ◽  
Didier Dutartre ◽  
Elie Andre
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