Atomic Force Microscopy Investigation of Tensile-Stressed Silicon Grown by Rapid Thermal Chemical Vapour Deposition onSi0.68Ge0.32Relaxed Pseudo-substrates
1994 ◽
Vol 33
(Part 1, No. 12A)
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pp. 6437-6442
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2001 ◽
Vol 8
(5)
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pp. 343-347
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1996 ◽
Vol 24
(8)
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pp. 503-510
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1999 ◽
Vol 198-199
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pp. 258-263
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2017 ◽
Vol 52
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pp. 1700021
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2012 ◽
pp. 1019-1025
2020 ◽
Vol 124
(28)
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pp. 5872-5883