Novel Impedance-Matching Method for Plasma Processing at Very High Frequency Band
1996 ◽
Vol 35
(Part 1, No. 9A)
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pp. 4799-4806
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Keyword(s):
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2020 ◽
Vol 30
(11)
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pp. 1909501
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Keyword(s):
2010 ◽
Vol 25
(11n12)
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pp. 922-935
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Keyword(s):
2002 ◽