Microstructure of Polysilicon Films Grown by Catalytic Chemical Vapor Deposition Method
1998 ◽
Vol 37
(Part 1, No. 1)
◽
pp. 92-93
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1994 ◽
Vol 33
(Part 2, No. 9A)
◽
pp. L1209-L1211
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2009 ◽
Vol 9
(4)
◽
pp. 2480-2495
◽
1987 ◽
Vol 97-98
◽
pp. 1379-1382
◽
2007 ◽
Vol 126
(6)
◽
pp. 064704
◽
2005 ◽
1990 ◽
Vol 29
(Part 2, No. 8)
◽
pp. L1366-L1368
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