Silicon nitride produced by catalytic chemical vapor deposition method

Journal of Applied Physics ◽

10.1063/1.344068 ◽

1989 ◽

Vol 66 (8) ◽

pp. 3612-3617 ◽

Author(s):

Hideki Matsumura

Keyword(s):

Chemical Vapor Deposition ◽

Silicon Nitride ◽

Vapor Deposition ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Deposition Method ◽

Catalytic Chemical Vapor Deposition

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Low Temperature Deposition of Silicon Nitride by the Catalytic Chemical Vapor Deposition Method

Japanese Journal of Applied Physics ◽

10.1143/jjap.28.2157 ◽

1989 ◽

Vol 28 (Part 1, No. 10) ◽

pp. 2157-2161 ◽

Author(s):

Hideki Matsumura

Keyword(s):

Chemical Vapor Deposition ◽

Silicon Nitride ◽

Low Temperature ◽

Vapor Deposition ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Deposition Method ◽

Catalytic Chemical Vapor Deposition ◽

Low Temperature Deposition ◽

Temperature Deposition

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Improved Properties of Silicon Nitride Films Prepared by the Catalytic Chemical Vapor Deposition Method

Japanese Journal of Applied Physics ◽

10.1143/jjap.36.7035 ◽

1997 ◽

Vol 36 (Part 1, No. 11) ◽

pp. 7035-7040 ◽

Author(s):

Shinya Okada ◽

Hideki Matsumura

Keyword(s):

Chemical Vapor Deposition ◽

Silicon Nitride ◽

Vapor Deposition ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Deposition Method ◽

Catalytic Chemical Vapor Deposition ◽

Silicon Nitride Films

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Effect of Template on the Structure of Carbon Nanotubes Grown by Catalytic Chemical Vapor Deposition Method

Modern Chemistry & Applications ◽

10.4172/2329-6798.1000207 ◽

2017 ◽

Vol 05 (02) ◽

Author(s):

Hekmat F ◽

Sohrabi B ◽

Rahmanifar MS

Keyword(s):

Carbon Nanotubes ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Deposition Method ◽

Catalytic Chemical Vapor Deposition ◽

Structure Of Carbon Nanotubes

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Study on catalytic chemical vapor deposition method to prepare hydrogenated amorphous silicon

Journal of Applied Physics ◽

10.1063/1.343278 ◽

1989 ◽

Vol 65 (11) ◽

pp. 4396-4402 ◽

Author(s):

Hideki Matsumura

Keyword(s):

Chemical Vapor Deposition ◽

Amorphous Silicon ◽

Vapor Deposition ◽

Hydrogenated Amorphous Silicon ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Deposition Method ◽

Catalytic Chemical Vapor Deposition ◽

Hydrogenated Amorphous

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Fabrication of PTFE thin films by dual catalytic chemical vapor deposition method

Thin Solid Films ◽

10.1016/j.tsf.2007.06.185 ◽

2008 ◽

Vol 516 (5) ◽

pp. 687-690 ◽

Author(s):

Hiroaki Yasuoka ◽

Masahiro Yoshida ◽

Ken Sugita ◽

Keisuke Ohdaira ◽

Hideyuki Murata ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Deposition Method ◽

Catalytic Chemical Vapor Deposition

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Microstructure of Polysilicon Films Grown by Catalytic Chemical Vapor Deposition Method

Japanese Journal of Applied Physics ◽

10.1143/jjap.37.92 ◽

1998 ◽

Vol 37 (Part 1, No. 1) ◽

pp. 92-93 ◽

Author(s):

An-Qiang He ◽

Akira Heya ◽

Nobuo Otsuka ◽

Hideki Matsumura

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Deposition Method ◽

Catalytic Chemical Vapor Deposition ◽

Polysilicon Films

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The Catalyst for Growing Single-Walled Carbon Nanotubes by Catalytic Chemical Vapor Deposition Method

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2009.1297 ◽

2009 ◽

Vol 9 (4) ◽

pp. 2480-2495 ◽

Author(s):

Avetik R. Harutyunyan

Keyword(s):

Carbon Nanotubes ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Single Walled Carbon Nanotubes ◽

Chemical Vapor Deposition Method ◽

Deposition Method ◽

Catalytic Chemical Vapor Deposition ◽

Single Walled Carbon ◽

Walled Carbon Nanotubes

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Catalytic chemical vapor deposition method to obtain high quality amorphous silicon and silicon-germanium

Journal of Non-Crystalline Solids ◽

10.1016/0022-3093(87)90330-9 ◽

1987 ◽

Vol 97-98 ◽

pp. 1379-1382 ◽

Author(s):

Hideki Matsumura

Keyword(s):

Chemical Vapor Deposition ◽

Amorphous Silicon ◽

Vapor Deposition ◽

Silicon Germanium ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Deposition Method ◽

High Quality ◽

Catalytic Chemical Vapor Deposition

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Phase separations of single-crystal nanowires grown by self-catalytic chemical vapor deposition method

The Journal of Chemical Physics ◽

10.1063/1.2432111 ◽

2007 ◽

Vol 126 (6) ◽

pp. 064704 ◽

Author(s):

Maoqi He ◽

Abhishek Motayed ◽

S. Noor Mohammad

Keyword(s):

Chemical Vapor Deposition ◽

Single Crystal ◽

Vapor Deposition ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Deposition Method ◽

Phase Separations ◽

Catalytic Chemical Vapor Deposition

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Preparation of amorphous composites of silicon nitride and carbon layers on silica glass by chemical vapor deposition method

Journal of Non-Crystalline Solids ◽

10.1016/s0022-3093(99)00886-8 ◽

2000 ◽

Vol 265 (1-2) ◽

pp. 120-124 ◽

Author(s):

Andrzej Kwatera ◽

Agata Sawka

Keyword(s):

Chemical Vapor Deposition ◽

Silicon Nitride ◽

Vapor Deposition ◽

Silica Glass ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Deposition Method

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