Characteristics of Indium Tin Oxide Films Deposited by DC and RF Magnetron Sputtering

Japanese Journal of Applied Physics ◽

10.1143/jjap.40.3364 ◽

2001 ◽

Vol 40 (Part 1, No. 5A) ◽

pp. 3364-3369 ◽

Author(s):

Wenli Deng ◽

Taizo Ohgi ◽

Hitoshi Nejo ◽

Daisuke Fujita

Keyword(s):

Magnetron Sputtering ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Rf Magnetron Sputtering ◽

Tin Oxide Films

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Indium tin oxide films grown at room temperature by RF-magnetron sputtering in oxygen-free environment

2012 IEEE International Conference on Oxide Materials for Electronic Engineering (OMEE) ◽

10.1109/omee.2012.6464842 ◽

2012 ◽

Author(s):

D. Kudryashov ◽

A. Gudovskikh ◽

K. Zelentsov

Keyword(s):

Magnetron Sputtering ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Room Temperature ◽

Oxide Films ◽

Rf Magnetron Sputtering ◽

Free Environment ◽

Tin Oxide Films

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Properties of indium tin oxide films deposited by RF magnetron sputtering at various substrate temperatures

Micro & Nano Letters ◽

10.1049/mnl.2012.0454 ◽

2012 ◽

Vol 7 (8) ◽

pp. 835 ◽

Author(s):

Long Bo ◽

Cheng Shuying

Keyword(s):

Magnetron Sputtering ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Rf Magnetron Sputtering ◽

Substrate Temperatures ◽

Tin Oxide Films

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Opto-electronic properties of titanium-doped indium–tin-oxide films deposited by RF magnetron sputtering at room temperature

Materials Science and Engineering B ◽

10.1016/j.mseb.2006.07.027 ◽

2006 ◽

Vol 134 (1) ◽

pp. 68-75 ◽

Author(s):

Chih-Hao Yang ◽

Shih-Chin Lee ◽

Tien-Chai Lin ◽

Wen-Yan Zhuang

Keyword(s):

Magnetron Sputtering ◽

Electronic Properties ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Room Temperature ◽

Oxide Films ◽

Rf Magnetron Sputtering ◽

Tin Oxide Films

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Optimization of low temperature RF-magnetron sputtering of indium tin oxide films for solar cell applications

Applied Surface Science ◽

10.1016/j.apsusc.2019.03.275 ◽

2019 ◽

Vol 484 ◽

pp. 257-264 ◽

Author(s):

M.G. Sousa ◽

A.F. da Cunha

Keyword(s):

Low Temperature ◽

Magnetron Sputtering ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Rf Magnetron Sputtering ◽

Tin Oxide Films

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The effect of annealing on the structural, electrical, optical and electrochromic properties of indium-tin-oxide films deposited by RF magnetron sputtering technique

Optik ◽

10.1016/j.ijleo.2017.06.016 ◽

2017 ◽

Vol 142 ◽

pp. 320-326 ◽

Author(s):

Gizem Durak Yüzüak ◽

Özlem Duyar Coşkun

Keyword(s):

Magnetron Sputtering ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Rf Magnetron Sputtering ◽

Electrochromic Properties ◽

Tin Oxide Films

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Preparation and characterization of tantalum-doped indium tin oxide films deposited by magnetron sputtering

Scripta Materialia ◽

10.1016/j.scriptamat.2007.09.028 ◽

2008 ◽

Vol 58 (3) ◽

pp. 203-206 ◽

Author(s):

Bo Zhang ◽

Xianping Dong ◽

Xiaofeng Xu ◽

Jiansheng Wu

Keyword(s):

Magnetron Sputtering ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Tin Oxide Films

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Effects of Annealing Atmosphere on the Characteristics of Tin Oxide Films Prepared by RF-magnetron Sputtering

Journal of the Korean Ceramic Society ◽

10.4191/kcers.2004.41.1.036 ◽

2004 ◽

Vol 41 (1) ◽

pp. 36-40

Keyword(s):

Magnetron Sputtering ◽

Tin Oxide ◽

Oxide Films ◽

Rf Magnetron Sputtering ◽

Annealing Atmosphere ◽

Tin Oxide Films

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Study of annealed indium tin oxide films prepared by rf reactive magnetron sputtering

Vacuum ◽

10.1016/0042-207x(94)00150-2 ◽

1995 ◽

Vol 46 (7) ◽

pp. 673-680 ◽

Author(s):

Li-jian Meng ◽

A Maçarico ◽

R Martins

Keyword(s):

Magnetron Sputtering ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Tin Oxide Films

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Effect of cesium assistance on the electrical and structural properties of indium tin oxide films grown by magnetron sputtering

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.3136854 ◽

2009 ◽

Vol 27 (4) ◽

pp. 643-647 ◽

Author(s):

Jaewon Song ◽

Cheol Seong Hwang ◽

Sung Jin Park ◽

Neung Ku Yoon

Keyword(s):

Magnetron Sputtering ◽

Structural Properties ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Tin Oxide Films

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Room Temperature Synthesis of Transparent and Conducting Indium Tin Oxide Films with High Mobility and Figure of Merit by RF-Magnetron Sputtering

Journal of Electronic Materials ◽

10.1007/s11664-019-07533-8 ◽

2019 ◽

Vol 48 (11) ◽

pp. 7192-7202 ◽

Author(s):

Ajinkya Bhorde ◽

Ravindra Waykar ◽

Shruthi Nair ◽

Haribhau Borate ◽

Subhash Pandharkar ◽

...

Keyword(s):

Magnetron Sputtering ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Figure Of Merit ◽

Room Temperature ◽

High Mobility ◽

Rf Magnetron Sputtering ◽

Temperature Synthesis ◽

Room Temperature Synthesis ◽

Tin Oxide Films

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