Preparation and characterization of tantalum-doped indium tin oxide films deposited by magnetron sputtering

Scripta Materialia ◽

10.1016/j.scriptamat.2007.09.028 ◽

2008 ◽

Vol 58 (3) ◽

pp. 203-206 ◽

Author(s):

Bo Zhang ◽

Xianping Dong ◽

Xiaofeng Xu ◽

Jiansheng Wu

Keyword(s):

Magnetron Sputtering ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Tin Oxide Films

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Microstructural characterization of high-quality indium tin oxide films deposited by thermionically enhanced magnetron sputtering at low temperature

Vacuum ◽

10.1016/j.vacuum.2014.03.018 ◽

2014 ◽

Vol 107 ◽

pp. 56-61 ◽

Author(s):

Ying-Feng Lan ◽

Ying-Hung Chen ◽

Ju-Liang He ◽

Jing-Tang Chang

Keyword(s):

Low Temperature ◽

Magnetron Sputtering ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Microstructural Characterization ◽

High Quality ◽

Tin Oxide Films

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Characterization of indium tin oxide films by RF-assisted DC magnetron sputtering

Applied Surface Science ◽

10.1016/j.apsusc.2012.02.030 ◽

2012 ◽

Vol 258 (15) ◽

pp. 5593-5598 ◽

Author(s):

Boen Houng ◽

Adam Wang

Keyword(s):

Magnetron Sputtering ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Dc Magnetron Sputtering ◽

Tin Oxide Films

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Growth and Characterization of Indium Tin Oxide Films Grown on Polymer Substrates by DC Magnetron Sputtering

Japanese Journal of Applied Physics ◽

10.1143/jjap.42.3619 ◽

2003 ◽

Vol 42 (Part 1, No. 6A) ◽

pp. 3619-3620 ◽

Author(s):

Suchandra Bhaumik ◽

Asok K. Barua

Keyword(s):

Magnetron Sputtering ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Dc Magnetron Sputtering ◽

Polymer Substrates ◽

Tin Oxide Films

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Fabrication and characterization of highly transparent and conductive indium tin oxide films made with different solution-based methods

Materials Research Express ◽

10.1088/2053-1591/3/11/116408 ◽

2016 ◽

Vol 3 (11) ◽

pp. 116408 ◽

Author(s):

N Xia ◽

R A Gerhardt

Keyword(s):

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Fabrication And Characterization ◽

Tin Oxide Films

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Characteristics of Indium Tin Oxide Films Deposited by DC and RF Magnetron Sputtering

Japanese Journal of Applied Physics ◽

10.1143/jjap.40.3364 ◽

2001 ◽

Vol 40 (Part 1, No. 5A) ◽

pp. 3364-3369 ◽

Author(s):

Wenli Deng ◽

Taizo Ohgi ◽

Hitoshi Nejo ◽

Daisuke Fujita

Keyword(s):

Magnetron Sputtering ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Rf Magnetron Sputtering ◽

Tin Oxide Films

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Indium tin oxide films grown at room temperature by RF-magnetron sputtering in oxygen-free environment

2012 IEEE International Conference on Oxide Materials for Electronic Engineering (OMEE) ◽

10.1109/omee.2012.6464842 ◽

2012 ◽

Author(s):

D. Kudryashov ◽

A. Gudovskikh ◽

K. Zelentsov

Keyword(s):

Magnetron Sputtering ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Room Temperature ◽

Oxide Films ◽

Rf Magnetron Sputtering ◽

Free Environment ◽

Tin Oxide Films

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Study of annealed indium tin oxide films prepared by rf reactive magnetron sputtering

Vacuum ◽

10.1016/0042-207x(94)00150-2 ◽

1995 ◽

Vol 46 (7) ◽

pp. 673-680 ◽

Author(s):

Li-jian Meng ◽

A Maçarico ◽

R Martins

Keyword(s):

Magnetron Sputtering ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Tin Oxide Films

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Effect of cesium assistance on the electrical and structural properties of indium tin oxide films grown by magnetron sputtering

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.3136854 ◽

2009 ◽

Vol 27 (4) ◽

pp. 643-647 ◽

Author(s):

Jaewon Song ◽

Cheol Seong Hwang ◽

Sung Jin Park ◽

Neung Ku Yoon

Keyword(s):

Magnetron Sputtering ◽

Structural Properties ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Tin Oxide Films

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Characteristics of indium tin oxide films deposited by r.f. magnetron sputtering

Thin Solid Films ◽

10.1016/0040-6090(94)06331-1 ◽

1995 ◽

Vol 257 (1) ◽

pp. 32-35 ◽

Author(s):

R.N. Joshi ◽

V.P. Singh ◽

J.C. McClure

Keyword(s):

Magnetron Sputtering ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Tin Oxide Films

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Effect of deflection on the mechanical and optoelectronic properties of indium tin oxide films deposited on polyethylene terephthalate substrates by pulse magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2008.10.019 ◽

2009 ◽

Vol 517 (5) ◽

pp. 1701-1705 ◽

Author(s):

Y.C. Lin ◽

W.Q. Shi ◽

Z.Z. Chen

Keyword(s):

Magnetron Sputtering ◽

Polyethylene Terephthalate ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Optoelectronic Properties ◽

Pulse Magnetron ◽

Tin Oxide Films

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