Relationship between Textured Structure of Substrates and Defect Density of Catalytic Chemical Vapor Deposition Amorphous Silicon Films

2007 ◽  
Vol 46 (5A) ◽  
pp. 2852-2857 ◽  
Author(s):  
Ken Sugita ◽  
Koichi Koyama ◽  
Keisuke Ohdaira ◽  
Hideki Matsumura
Keyword(s):  
Chemical Vapor Deposition ◽  
Amorphous Silicon ◽  
Vapor Deposition ◽  
Defect Density ◽  
Chemical Vapor ◽  
Silicon Films ◽  
Catalytic Chemical Vapor Deposition

Deposition of amorphous silicon films by hot-wire chemical vapor deposition

1999 ◽  
Vol 85 (9) ◽  
pp. 6843-6852 ◽  
Author(s):  
K. F. Feenstra ◽  
R. E. I. Schropp ◽  
W. F. Van der Weg
Keyword(s):  
Chemical Vapor Deposition ◽  
Amorphous Silicon ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Silicon Films ◽  
Hot Wire

Growth of vertically oriented films of carbon nanotubes by activated catalytic chemical vapor deposition on Fe–Co/TiN/Si(100) substrates

2008 ◽  
Vol 23 (3) ◽  
pp. 619-631 ◽  
Author(s):  
F. Le Normand ◽  
C.T. Fleaca ◽  
M. Gulas ◽  
A. Senger ◽  
O. Ersen ◽  
...  
Keyword(s):  
Carbon Nanotubes ◽  
Chemical Vapor Deposition ◽  
High Temperature ◽  
Vapor Deposition ◽  
Defect Density ◽  
Large Diameter ◽  
Chemical Vapor ◽  
Oxygen Impurity ◽  
Catalytic Chemical Vapor Deposition ◽  
Dense Films

In this paper, the growth of thin and dense films of vertically aligned carbon nanotubes (CNTs) on Fe–Co/TiN/Si(100) substrates is reported. Special attention is held to the preparation of the TiN buffer layers. This layer is deposited by pulse laser deposition at high temperature with a high texturation according to [TiN(100)//Si(100)]. Further ammonia heat treatment is performed at 623 K to control a Ti:N stoichiometry and remove oxygen impurity. Fe and Co as catalysts are subsequently deposited at high temperature (923 K) at the monolayer level with two ultrahigh vacuum evaporator cells. The growth of CNTs is performed by a direct-current plasma-enhanced and hot filaments-assisted catalytic chemical vapor deposition (dc HF CCVD) process. Highly dense films of CNTs, are obtained with only 0.5 nm Fe(Co) evaporated. Observations by transmission electron microscopy show that most of the CNTs display sizes in the 2.5–6 nm range, most of them with a double-wall (DW). This is in agreement with spectral features of the Raman radial breathing modes (RBM) in the 70–130 cm−1 range. Generally, these large-diameter DWCNTs display a high defect density with morphologies partially collapsed into flattened twisted shapes.

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